Cleaning liquid and cleaning method
A technology of cleaning liquid and cleaning objects, which is applied in the field of cleaning liquid, can solve problems such as increased wiring resistance and increased power consumption, and achieves the effects of inhibiting corrosion, improving productivity, and improving performance
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Embodiment 1~13
[0051] As shown in Table 1, hydrogen fluoride as component (a), ammonium sulfate as component (b), and water as component (c) were mixed to prepare a cleaning solution so that the concentration of hydrogen fluoride was 0.001 to 5% by weight, sulfuric acid The concentration of ammonium is 1 to 20% by weight.
Embodiment 14~17
[0053] As shown in Table 1, hydrogen fluoride as component (a), tetramethylammonium sulfate as component (b), and water as component (c) are mixed to prepare a cleaning solution so that the concentration of hydrogen fluoride is 0.01 to 0.1 wt. %, the concentration of tetramethylammonium sulfate is 1 to 10% by weight.
Embodiment 18
[0055] As shown in Table 1, hydrogen fluoride as component (a), ammonium sulfate and ammonium chloride as component (b), and water as component (c) were mixed to prepare a cleaning solution so that the concentration of hydrogen fluoride was 0.1% by weight. , the concentration of ammonium sulfate is 5% by weight, and the concentration of ammonium chloride is 5% by weight.
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