Equal-line-loss computation method for multi-line cutting machine

Abstract

An equal-line-loss computation method for a multi-line cutting machine is achieved by calculating loop rate of any one point in multi-line cutting. The loop rate of the any one point is calculated through the following formula: K=(1-beta*fw*a-2*beta*Vw*Vw) / (1+beta*fw*a), wherein r is the radius of a cutting material, p is a main roll groove distance, C is set abrasion area, a is linear acceleration, Vw is linear speed, L is the length of the cutting material, h is cutting depth, fw is inlet line quantity, k is loop rate, and V(h) is a function of the feeding speed and the cutting depth. Beta=alpha*V(h)*L*C / (fw*p*a*Vw) / 30. Alpha= sqrt (r*r-(r-h)*(r-h)). The V(h) is set before machining. The equal-line-loss computation method guarantees that a line is scraped until enough area is cut, namely abrasion loss is uniform, optimum abrasion loss is achieved, and a use amount of lines is saved.

Description

technical field [0001] The invention relates to a multi-wire cutting method. In particular, it relates to an equal wire loss calculation method for a multi-wire cutting machine, under the premise that the wear amount of the wire is determined by the area cut by the wire, and through calculation, it is ensured that the wire cuts a set area before being scrapped. Background technique [0002] In semiconductor or sapphire processing, multi-wire cutting machines are often used. Multi-wire cutting machine is a new type of cutting equipment with a new concept, referred to as wire saw. Through the high-speed reciprocating motion of the metal wire, the abrasive is brought into the semiconductor processing area for grinding, and the hard and brittle materials such as semiconductors are cut into hundreds of thin slices at a time. . With its extremely high production efficiency and wafer output rate, the multi-wire cutting machine tends to gradually replace the inner circle cutting m...

AI Technical Summary

Problems solved by technology

[0006] (4) The main shaft winding wheel is generally made of resin material, which has poor wear resistance and heat dissipation. The merchant gives the longest life of a single piece, 800. h, and the wear depth of the groove exceeds 1. mm. It must be sent to a professional manufacturer for grinding. Re-grooving is complicated and costly. Recently, reels made of ceramic materials have shown high heat dissipation and anti-wear characteristics, and are expected to eventually replace resin reels.

Assuming that the incoming line is 300 meters and the return line is 240 meters, then 60 meters of lines are consumed in this cycle, and these lines are directly scrapped due to wear and tear.

But there is a problem, because the semiconductor ingot or sapphire rod is round, and the length and slice thickness are different, if the same process is used, the wear amount of the wire is not the same

For example, for a circular material, the chord length is relatively short at the beginning of cutting, and the wear amount of the thread is relatively small in the same cycle. When the chord length is close to the diameter, the wear of the thread is relatively large. Similarly, for short length Or when the thickness is relatively large and the number of pieces is small, under the same process conditions, the wear of the wire is small, so that the steel wire is not fully utilized and scrapped, resulting in a great waste