Surface defect detecting system of crystalline silicon polished wafer

Abstract

Disclosed is a surface defect detecting system of a crystalline silicon polished wafer. The detecting system comprises a laser module, an optical scanning module, an image detecting module, a crystalline silicon polished wafer moving module and a display control module, wherein the laser module is connected with the optical scanning module which is fixed on one side above a crystalline silicon polished wafer to be detected, the image detecting module is fixed on the other side opposite to the optical scanning module above the crystalline silicon polished wafer to be detected in a radian of pi / 2 and connected with the display control module, and the crystalline silicon polished wafer moving module is connected with the display control module. According to the surface defect detecting system of the crystalline silicon polished wafer, characteristics of laser coherence, direction concentration and high resolution are used for the surface defect detection of the crystalline silicon polished wafer combined with methods of mechanical and electronic integration and image algorithm, so that defects of small cracks, fine particles, contamination, convex-concave, and the like on the surface of the crystalline silicon polished wafer can be detected, and reliable quality test for production of integrated circuits and solar photovoltaic cells is guaranteed.

Description

technical field [0001] The invention relates to the field of automatic optical detection and control, in particular to an automatic optical detection system for surface defects of crystal silicon polished wafers. Background technique [0002] With the development of economy, the sharp contradiction between energy shortage and environmental pollution has become a problem that all countries in the world are facing. Among the many new energy sources, solar energy has the advantages of clean and pollution-free, safe and reliable, less constraints, inexhaustible, sustainable utilization, etc., so it has incomparable advantages. With the gradual maturity and popularization of solar photovoltaic power generation technology, the demand for solar photovoltaic cells will show an exponential growth. On the other hand, with the in-depth development of information technology, the demand for integrated circuits is also increasing year by year. The processing and testing technology of po...

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Problems solved by technology

[0005] In order to overcome the shortcomings of existing crystal silicon polished surface detection equipment, such as limited defect resolution capability, complex system, and high price, the present invention provides an optical automatic detection system with high resolution capability for crystal silicon polished surface defect detection

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