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Preparation method of zinc oxide-based tubular rotary target material

A technology of rotating target and tubular base, which is applied in the field of preparation of zinc oxide-based tubular rotating targets, can solve the problems of reduced efficiency, deterioration of coating film quality, and easy generation of abnormal discharge, etc., to eliminate internal stress, reduce volume shrinkage, and avoid Density reduction effect

Active Publication Date: 2012-07-25
宁夏中色新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For the ceramic rotating target, it is made of multi-section splicing. For a given length, the less the number of single sections required, the better. The more splicing gaps, the abnormal discharge is easy to occur in high-speed and high-power sputtering, resulting in efficiency Reduced, coating quality deteriorates

Method used

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  • Preparation method of zinc oxide-based tubular rotary target material
  • Preparation method of zinc oxide-based tubular rotary target material
  • Preparation method of zinc oxide-based tubular rotary target material

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preparation example Construction

[0018] The preparation method of the present invention is completed according to the following steps:

[0019] 1. Preparation of zinc salt solution: Weigh quantitative metal zinc (≥4N) and dissolve it completely with superior pure 1+1 nitric acid and dilute it with deionized water to [Zn 2+ ] concentration is 1.5-2.0mol / L;

[0020] 2. Preparation of aluminum salt solution: according to the ratio of Zn: Al=93-99: 1-7 (at%, atomic ratio), weigh Al(NO 3 ) 3 9H 2 O (excellent grade), completely dissolved in absolute ethanol. If preparing pure zinc oxide powder, this step is omitted;

[0021] 3. Precipitant solution preparation: weigh quantitative NH 4 HCO 3 (excellent pure), completely dissolved in deionized water, and prepared into a 25% (wt / v%) solution;

[0022] 4. Transfer the zinc salt solution and aluminum salt solution into the reaction kettle, stir for 20 minutes, and adjust the temperature of the reaction solution to 30-45°C.

[0023] 5. At a stirring speed of 300...

Embodiment 1

[0030] Weighing: Metal zinc 9830g (≥4N) is completely dissolved with superior grade pure 1+1 (v / v%) nitric acid, and diluted with deionized water to [Zn 2+ ] Concentration is 1.2mol / L, is mixed with zinc salt solution; Weigh Al(NO 3 ) 3 9H 2 O (excellent grade pure) 2347g, add 10L absolute ethanol to dissolve completely, be mixed with aluminum salt solution; Precipitant solution: weigh NH 4 HCO 3 (Excellent grade pure) 40000g, prepared into 25% (wt / v%) solution with deionized water.

[0031] The zinc salt solution and the aluminum salt solution were transferred into the reaction kettle, stirred for 20 minutes, and the temperature of the reaction solution was adjusted to 35°C. At a stirring speed of 400 rpm, add the precipitant solution into the mixed solution of zinc salt and aluminum salt at a rate of 10 L / min, adjust the reaction pH value to 7.0-7.8, and react for 60 minutes to obtain a reaction product. Transfer the reaction product to a ceramic membrane washing filter...

Embodiment 2

[0035] Weighing: Metal zinc 10000g (≥4N) is completely dissolved with superior grade pure 1+1 (v / v%) nitric acid, and diluted with deionized water to [Zn 2+ ] Concentration is 1.2mol / L, is prepared into zinc salt solution; precipitant solution: weigh NH 4HCO 3 (Excellent grade pure) 40000g, prepared into 25% (wt / v%) solution with deionized water.

[0036] The zinc salt solution and the aluminum salt solution were transferred into the reaction kettle, stirred for 20 minutes, and the temperature of the reaction solution was adjusted to 40°C. At a stirring speed of 400 rpm, add the precipitant solution into the mixed solution of zinc salt and aluminum salt at a rate of 5 L / min, adjust the reaction pH to 6.5-7.0, and react for 60 minutes to obtain a reaction product. Transfer the reaction product to a ceramic membrane washing filter, and wash it repeatedly with deionized water until the conductivity of the washing supernatant is ≤20 μs, then stop washing. The obtained precipita...

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Abstract

The invention relates to a preparation method of a zinc oxide-based tubular rotary target material. The preparation method comprises the following steps: taking NH4HCO3 as a precipitant, preparing pure zinc oxide powder and Al-doped zinc oxide powder with an atomic ratio of 1-7at% by a chemical precipitation method, presintering, conglomerating and shaping the powder, filling the powder into a mould, moulding the powder in a cold isostatic pressing manner at 300-340MPa, obtaining a biscuit with a relative density of 70-75%, sintering the biscuit under an oxidizing atmosphere, and processing the sintered biscuit to obtain the rotary target material. Compared with the prior art, the preparation method provided by the invention has the beneficial effects that the density of the biscuit is improved by 10-15%; the volume shrinkage in later stage sintering is reduced; the sintering deformation of the tubular target with a large length-diameter ratio is effectively controlled; and in the process of sintering, the circulating oxygen is served as a control atmosphere to avoid the component changing, large pores on the surface and density reduction caused by the large pores on the surface.

Description

technical field [0001] The invention relates to a preparation method of a zinc oxide-based tubular rotating target. Background technique [0002] ZnO is a wide energy gap multifunctional semiconductor material, which is considered as one of the third generation semiconductor materials. It has excellent properties such as gas sensitivity, pressure sensitivity, piezoelectricity, transparent conductivity, photoelectricity, and easy integration of various semiconductor materials. High-quality ZnO-based film has the characteristics of wide band gap, low dielectric constant, good temperature stability, high light transmittance, stable chemical properties, etc. Its raw materials are abundant and easy to obtain, non-toxic, and low manufacturing cost. Display devices, such as LCD, OLED, touch panel, etc.; thin-film solar cells; Low-E (low radiation) energy-saving architectural glass; electromagnetic protective screen; a wide range of applications. [0003] Compared with the planar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/453C04B35/622C04B35/64
Inventor 刘孝宁刘秉宁孙本双杨小林王廷东马建保韩建华
Owner 宁夏中色新材料有限公司
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