Comprehensive polarization measuring device and method of argon fluoride (ArF) laser optical thin film elements

Abstract

The invention relates to a comprehensive polarization measuring device of argon fluoride (ArF) laser optical thin film elements. An ArF excimer laser, an ArF excimer laser beam expanding and collimating device, an iris diaphragm, a polarizer, a beam splitter and a sample platform of the comprehensive polarization measuring device are placed in sequence along a main optical axis; a reference lightpolarization detecting device is positioned on a reflected light path of the beam splitter; the sample platform is positioned on a transmission light path of the beam splitter; a transmission light polarization measuring device is fixedly mounted on a first rotatable supporting arm; a reflected light polarization detecting device is fixedly mounted on a second rotatable supporting arm; the sampleplatform, the first rotatable supporting arm and the second rotatable supporting arm are positioned in the same plane and are provided with the same rotation center; and the rotation center is positioned on the main optical axis. By adopting the comprehensive polarization measuring device, the polarization reflectivity, the transmissivity, the reflection depolarization ratio and the transmission depolarization ratio of the optical thin film elements in different shapes, which are positioned at different incidence angles, can be measured at the same time, and thereby the need of various ArF laser optical thin film elements on polarization performance assessment can be met to the maximum limit.

Description

technical field [0001] The invention belongs to the technical field of ArF excimer laser application, and relates to a comprehensive polarization measurement device for ArF laser optical film elements. Background technique [0002] Light wave is a kind of transverse wave, and the vibration direction of its light wave vector is perpendicular to the propagation direction of light. According to the change of the vibration direction of the light wave vector, light can be divided into natural light and polarized light, and polarized light can be further divided into plane polarized light (linearly polarized light), circularly polarized light, elliptically polarized light, and partially polarized light. For linearly polarized light, according to the vibration direction of the light wave vector, it can be divided into P polarization and S polarization. The light wave electric vector parallel to the incident plane is P polarization, and the light wave electric vector perpendicular t...

AI Technical Summary

Problems solved by technology

Similar to the existing dual optical path spectrometer with polarization optical measurement accessories, the polarization characteristic measurement of this kind of polarization characteristic measurement device only uses a polarizing optical element, and does not use an analyzing optical element in front of the signal light detector. , it is also impossible to accurately evaluate the influence caused by the depolarization effect of optical thin film components, and the measurement accuracy of its polarization characteristics is relatively limited

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