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Water and oil repellency surface microstructure and manufacturing method thereof

A hydrophobic, oleophobic and microstructure technology, which is applied in the direction of microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems of poor performance repeatability, irregular micro-nano structure, poor uniformity, etc., and achieve flow resistance reduction, The effect of simple chemical treatment and high mechanical stability

Inactive Publication Date: 2012-04-25
SUN YAT SEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, liquids with low surface tension such as oils, organic solvents, etc. (the surface tension is usually only 1 / 3 of that of water) will generally spread quickly on this super-hydrophobic surface, so that the oleophobic effect of more than 90 degrees cannot be obtained.
Most of the oleophobic surfaces reported so far are irregular structures developed by nanotechnology, which cannot precisely control the micro-nano features. This structure has poor performance repeatability, poor uniformity, limited oleophobic effect, and difficulty in achieving large-scale surfaces. Application and other essential defects
[0003] To sum up, the defects of the current hydrophobic and oleophobic surface microstructures are that the micro-nano structure is irregular, and the micro-nano structure cannot be precisely controlled, resulting in poor repeatability and uniformity of the microstructure performance, limited oleophobic effect, and difficulty in large-area applications. Wait

Method used

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  • Water and oil repellency surface microstructure and manufacturing method thereof
  • Water and oil repellency surface microstructure and manufacturing method thereof
  • Water and oil repellency surface microstructure and manufacturing method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0036] like figure 1 As shown, a hydrophobic and oleophobic surface microstructure includes a substrate and a T-shaped micro-nanostructure etched on the substrate. The T-shaped micro-nanostructure includes a vertical part 1 and a horizontal part 2, and the horizontal part 2 is arranged on the vertical part. 1 top, and the horizontal part 2 is aligned with the center of the vertical part 1. There is a strong enough bonding force between the horizontal part 2 and the vertical part 1 to maintain a stable mechanical strength. The cross-sectional area of ​​the horizontal part 2 is larger than that of the vertical part 1, and the diameter of the horizontal part 2 is less than 50um. The T-shaped micro-nanostructures are arranged in an array, and the distance between adjacent T-shaped micro-nanostructures is no more than 15 times the diameter of the transverse part 2 .

[0037] like figure 2 and 3 As shown, the T-shaped micro-nanostructure can make use of the wetting properties o...

Embodiment 2

[0040] This embodiment is except following feature, and other is all identical with embodiment 1:

[0041] like Figure 5 The process steps shown are as follows: first, the surface is treated with substrate cleaning and mask pattern transfer process, and SiO with a thickness of 100nm-200nm is thermally grown. 2 thin-film silicon substrate; then, using CF 4 or CHF 3 Gas plasma etching and etching of SiO with photoresist as a mask 2 thin film until the silicon surface is exposed; then, the photoresist is washed off with stripper or acetone, and subjected to O 2plasma cleaning; furthermore, using XeF 2 The silicon surface is treated by a vapor phase etching process; finally, the XeF 2 The silicon surface treated by vapor phase etching process is obtained as Figure 9 The hydrophobic and oleophobic surface microstructure shown.

Embodiment 3

[0043] This embodiment is except following feature, and other is all identical with embodiment 1:

[0044] Such as Figure 6 The process steps shown are as follows: first, the surface is treated with substrate cleaning and mask pattern transfer process, and SiO with a thickness of 100nm-200nm is thermally grown. 2 thin-film silicon substrate; then, using CF 4 or CHF 3 Gas plasma etching and etching of SiO with photoresist as a mask 2 thin film until the silicon surface is exposed; then, the photoresist is washed off with stripper or acetone, and subjected to O 2 Plasma cleaning; moreover, using DRIE etching process to process the silicon surface; finally, using CVD chemical vapor deposition process to process the silicon surface treated by DRIE etching process, to obtain the following Figure 10 The hydrophobic and oleophobic surface microstructure shown.

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Abstract

The invention discloses a water and oil repellency surface microstructure which comprises a substrate and a T type micro-nanometer structure etched on the substrate, wherein the T type micro-nanometer structure comprises a vertical part and a transverse part which is arranged at the top end of the vertical part. A manufacturing technology of a water and oil repellency surface comprises the steps of substrate cleaning, mask pattern transfer, XeF2 gaseous phase etching process or DRIE (Deep Reactive Ion Etching) etching process, chemical vapor deposition or perfluorination silane monomer self-assembly, thereby the water and oil repellency surface microstructure with high mechanical stability, good technology repeatability and controlled geometric structure is obtained.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing technology, in particular to a hydrophobic and oleophobic surface micro-nano structure and a preparation method thereof. Background technique [0002] In the past 30 years, by simulating the natural micro-nano structures such as lotus leaves and water spiders, people have successfully developed many superhydrophobic materials with contact angles exceeding 150 degrees and easy sliding by using micro-electromechanical systems (MEMS) technology and nanotechnology. The superhydrophobic material can not only reduce the pollution and flow resistance of water and other high surface energy solutions, but also achieve self-cleaning effect. The structure of superhydrophobic materials is usually regular micro-pillars or undesigned micro-nanospheres, micro-nanofibers, pores, etc. that are difficult to precisely control. However, liquids with low surface tension such as oils, organic solvents...

Claims

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Application Information

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IPC IPC(8): H01L29/06H01L21/306H01L21/3065B81B1/00B81C1/00
Inventor 吴天准袁丽芳祝渊桂许春项荣汤子康铃木雄二
Owner SUN YAT SEN UNIV
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