Supersonic wave processing method of glass base microfluidic chip

Abstract

A supersonic wave processing method of a glass base microfluidic chip comprises steps of: processing a probe; pasting a paste adhesive tape on an upper surface of a glass substrate and a piece of glass flake on a lower surface of the glass substrate; carrying out supersonic wave processing; polishing by chemical attack; and finally completing preparation of the chip. The invention can be widely applied to manufacture of glass base microfluidic chip and other hard material biological chip and has characteristics of simple operation, high precision, high machining efficiency and reduced processing cost.

Description

technical field [0001] The invention relates to the technical field of microfluidic chips, in particular to an ultrasonic processing method for glass-based microfluidic chips. Background technique [0002] Microfluidics is a micro-analysis experimental device that integrates the basic operation units such as sample preparation, reaction, separation, and detection in the fields of biology and chemistry into a micron-scale chip, and automatically completes the entire analysis process; The microfluidic chip whose structure is characterized by pipeline network is a very active research field at present. The materials for making microfluidic chips mainly include silicon wafers, glass, quartz, and high molecular polymers represented by PDMS. Among them, glass and quartz have been widely used to make microfluidic chips due to their good thermal properties, electroosmotic properties, and excellent optical properties, as well as surface adsorption and surface reaction capabilities t...

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Problems solved by technology

[0006] In order to overcome the above-mentioned defects in the prior art, the purpose of the present invention is to provide an ultrasonic processing method for glass-based microfluidic chips, which is not suitable for large-scale processing due to the high processing cost, complicated processing equipment, and slow etching speed of traditional processing methods. In the environment of abrasive suspension, the processing probe with the characteristic morphology of the microfluidic chip structure is placed on the glass substrate, and the microfluidic chip structure is made on the glass-based material through ultrasonic vibration impact and polishing, and The surface quality of the microchannel of the chip is improved by chemical polishing, so as to produce a glass-based microfluidic chip with an aspect ratio greater than 10 and good surface characteristics; the invention has the advantages of simple operation, high precision, high processing efficiency, and reduces processing costs. It has low requirements on the processing environment and is suitable for mass production

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