Cross-scale micro-nano in-situ three-point bending mechanical performance testing platform

Abstract

The invention relates to a cross-scale micro-nano in-situ three-point bending mechanical performance testing platform which belongs to the field of in-situ mechanical performance testing and structurally comprises a precise drive unit, a transmission and execution unit, a signal control and detection unit and a connection and support unit, wherein a brushless direct-current servo motor is connected with a primary worm, connected with a secondary worm shaft through a primary worm gear drive pair, respectively connected with precise ball screws I and II through a secondary worm gear drive pair,and further connected with a hammer head. The cross-scale micro-nano in-situ three-point bending mechanical performance testing platform has the advantages of small volume, light weight, high rigidity, compact structure and high test precision, can provide plentiful test contents, and can be mutually compatible with carrier platforms of various electronic microscope vacuum cavities.

Description

technical field [0001] The invention relates to the field of in-situ mechanical performance testing, in particular to a cross-scale micro-nano scale in-situ three-point bending mechanical performance testing platform. While performing three-point bending loading on the sample, the microscopic deformation, damage and fracture of the sample during the loading process can be detected by microscopic imaging instruments such as electron microscope (such as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscope SPM, etc.) In-situ monitoring is implemented during the process; the sample can also be repeatedly loaded, and the sample can be observed online with a microscopic imaging instrument such as an electron microscope; the collection, control and conversion of the load / displacement signal can be realized to accurately measure the sample at the micro-nano scale It provides a new test method to reveal the mechanical properties of the sampl...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a cross-scale micro-nano level in-situ three-point bending mechanical performance test platform, which solves the problems of high cost, large volume, complex structure, heavy weight, low test accuracy and poor compatibility existing in the current technology.

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