Method for preparing metal electrodes of crystal silicon solar cell
A technology for solar cells and metal electrodes, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of limiting the photoelectric conversion efficiency of cells, difficult to control the groove technology, and increasing the rate of cell fragments, so as to improve the conductivity and reduce production. Cost, effect of reducing series resistance
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Embodiment 1
[0029] Step 1: According to the existing preparation process of crystalline silicon solar cells, diffuse and prepare a PN junction on the p-type single crystal silicon substrate, so that the upper surface of the p-type single crystal silicon substrate forms an n-type emitter surface. The specific process includes p Type single crystal silicon substrate cleaning and suede production, diffusion PN junction, secondary cleaning to remove surface contamination layer and plasma etching to remove edges.
[0030] Step 2: Prepare silicon nitride (SiN) on the n-type emitter surface of the p-type single crystal silicon wafer by PECVD x ) anti-reflection layer.
[0031] Step 3: Deposit a 500nm thick metal Al thin layer on the p-type conductive back surface by vacuum sputtering method, and x ) The surface of the anti-reflection layer is screen-printed with a relatively thin layer of Ag grid lines, and a traditional high-temperature sintering technology is used to form an Al back field see...
Embodiment 2
[0034] Step 1: According to the existing preparation process of crystalline silicon solar cells, diffuse and prepare a PN junction on the p-type single crystal silicon substrate, so that the upper surface of the p-type single crystal silicon substrate forms an n-type emitter surface. The specific process includes p Type single crystal silicon substrate cleaning and suede production, diffusion PN junction, secondary cleaning to remove surface contamination layer and plasma etching to remove edges.
[0035] Step 2: Prepare silicon nitride (SiN) on the n-type emitter surface of the p-type single crystal silicon wafer by PECVD x ) anti-reflection layer.
[0036] Step 3: Deposit a thin layer of metal Al with a thickness of 1 μm on the p-type conductive back surface by evaporation coating technology, and place it on the SiN x The surface of the anti-reflection layer is screen-printed with a relatively thin layer of Ag grid line, and the traditional high-temperature sintering techno...
Embodiment 3
[0039] Step 1: According to the existing preparation process of crystalline silicon solar cells, diffuse and prepare a PN junction on the p-type single crystal silicon substrate, so that the upper surface of the p-type single crystal silicon substrate forms an n-type emitter surface. The specific process includes p Type single crystal silicon substrate cleaning and suede production, diffusion PN junction, secondary cleaning to remove surface contamination layer and plasma etching to remove edges.
[0040] Step 2: Prepare silicon nitride (SiN) on the n-type emitter surface of the p-type single crystal silicon wafer by PECVD x ) anti-reflection layer.
[0041] Step 3: Print a relatively thin layer of Al paste on the entire surface of the p-type conductive back surface by evaporation coating technology, and coat the SiN xThe surface of the anti-reflection layer is screen-printed with a relatively thin layer of Ag grid line, and a 1 μm thick Al back field seed layer and a 1 μm th...
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