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Crystalline silicon solar cell and diffusion method thereof

A technology of solar cell sheet and diffusion method, which is applied in the direction of circuits, photovoltaic power generation, electrical components, etc., can solve the problems of low conversion efficiency of solar cells, achieve uniform sheet resistance, stable atmosphere, and improve spectral responsivity

Active Publication Date: 2014-02-05
JETION SOLAR HLDG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0014] In the actual production process, the conversion efficiency of solar cells produced by the diffusion method in the prior art is generally low. The inventors have found through research that the conversion efficiency of solar cells can be further improved

Method used

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  • Crystalline silicon solar cell and diffusion method thereof
  • Crystalline silicon solar cell and diffusion method thereof
  • Crystalline silicon solar cell and diffusion method thereof

Examples

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Embodiment 1

[0042] This embodiment provides a diffusion method, which is mainly applied to the production of crystalline silicon solar cells. The basic process is as follows: image 3 As shown, including the following steps:

[0043] Step S31: Put the silicon wafer in a diffusion furnace and raise the temperature to 780°C to 800°C.

[0044] Preferably it is 790 degreeC.

[0045] Step S32: Inject small nitrogen and oxygen with a volume flow ratio of 4:1 to 7:1 through the diffusion furnace tube, and at the same time introduce large nitrogen of 5L / min to 7L / min, and the temperature in the diffusion furnace is maintained at 780°C ~800℃, time is 15min~20min.

[0046] The flow rate of small nitrogen is preferably 1.3 L / min, the flow rate of oxygen is preferably 0.3 L / min, the flow rate of large nitrogen is preferably 5.4 L / min, and the time is preferably 17 min.

[0047] Step S33: Pass 2L / min~3L / min oxygen and 4L / min~5L / minL large nitrogen into the diffusion furnace through the diffusion furnace tube,...

Embodiment 2

[0078] This embodiment provides a crystalline silicon solar cell prepared by the diffusion method described in the previous embodiment.

[0079] The PN junction depth of the solar cell is between 0.18um and 0.22um, that is, about 0.2um; the unevenness of the sheet resistance is controlled within 4%; the conversion efficiency is between 16.5% and 17.5%, and the average value can reach 16.84%.

[0080] The junction depth of the solar cell is shallower than the junction depth under the existing diffusion technology, and the unevenness of the sheet resistance is also reduced a lot, which is higher than the average conversion efficiency under the existing diffusion technology.

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Abstract

The invention discloses a crystalline silicon solar cell and a diffusion method thereof. The method comprises the following steps of: putting a silicon chip into a diffusion furnace and raising the temperature to 780-800 DEG C; introducing a preset amount of small nitrogen, oxygen and large nitrogen into the diffusion furnace through a diffusion furnace tube and keeping the internal temperature of the diffusion furnace at 780-800 DEG C for 15-20 minutes; introducing a preset amount of oxygen and large nitrogen into the diffusion furnace through the diffusion furnace tube and raising the internal temperature of the diffusion furnace to 850-870 DEG C for 10-18 minutes; and cooling the diffusion furnace and taking the silicon chip out, wherein the gas flow in the diffusion furnace tube is constant in the entire diffusion process. The depth of a PN junction of a solar cell produced with the method is small, the square resistance is more uniform, and the conversion efficiency of the solar cell is increased.

Description

Technical field [0001] The invention relates to the production and processing technology of solar cells, and more specifically, to a crystalline silicon solar cell sheet and a diffusion method thereof. Background technique [0002] In recent years, the continuous advancement of solar cell production technology, the continuous reduction of production costs, and the continuous improvement of conversion efficiency have made the application of photovoltaic power generation increasingly popular and developed rapidly, and has gradually become an important source of power supply. Solar cells can convert light energy into electric energy under the sunlight to realize photovoltaic power generation. [0003] The production process of solar cells is more complicated. Simply put, the current production process of solar cells can be divided into the following main steps: [0004] S11. Ultrasonic cleaning, using ultrasonic to clean the surface of the silicon wafer; [0005] S12. Textured surface, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/0352H01L31/068
CPCY02E10/50Y02E10/547Y02P70/50
Inventor 汪琴霞
Owner JETION SOLAR HLDG
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