Integrated laminated transformer based on two layers of metal
An integrated layer and transformer technology, applied in the direction of electric solid-state devices, semiconductor devices, semiconductor/solid-state device components, etc., can solve the problem of impedance matching devices or signal feedback devices changing current or changing voltage, reducing gain and deteriorating noise, and integrating laminated transformer applications Range limitation, reduce amplifier noise performance and other issues, achieve strong coupling, save chip area, and small size
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[0021] In order to deepen the understanding of the present invention, the present invention will be described in further detail below in conjunction with the examples and accompanying drawings. The examples are only used to explain the present invention, and do not constitute regulations on the protection scope of the present invention.
[0022] like figure 1 and figure 2 As shown, an integrated laminated transformer based on two layers of metal is composed of a substrate 1, a 3-layer dielectric 2 on the substrate 1, and a 2-turn secondary coil 3 and a 6-turn primary coil 4 placed in the dielectric 2 . Wherein, the substrate 1 is 100 μm gallium arsenide GaAs, three layers of dielectric 2 are arranged on the upper plane of the substrate 1, and the first layer of dielectric 2 is silicon tetranitride Si from bottom to top. 3 N 4 , the second dielectric layer 2 is silicon dioxide SiO 2 , the third dielectric layer 2 is silicon nitride SiN. The primary coil 4 of the integrate...
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