Chip for two-way voltage regulator diode DB3 and manufacturing technique thereof
A technology of two-way voltage stabilization and production process, which is applied in the photoengraving process, optics, instruments and other directions of the pattern surface, which can solve the problem of high corrosion debris rate in deep mesa grooves, insufficient high temperature rebound voltage, and insufficient breakdown voltage. and other problems, to achieve the effect of improving voltage resistance stability, reducing high temperature power consumption, and improving stability
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[0023] Such as figure 1 The chip structure of the bidirectional Zener diode DB3 shown is N + PN + type. The chip sections are chip 1 of DB3, mesa groove 2, glass layer 3, and metal surface 4 in sequence.
[0024] Such as figure 2 The production process of the shown bidirectional voltage regulator diode DB3 is as follows:
[0025] 1) Pre-oxidation treatment: chemically treat the surface of silicon wafers through acid, alkali, deionized water and other processes.
[0026] 2) Oxidation: Clean the original silicon wafer, grow an oxide layer in an oxidation furnace at 1100-1200 ° C as a mask, and prepare to open windows and trenches;
[0027] 3) Three photolithography: the oxidized silicon wafer is coated with glue, photolithographic mark, photolithographic window, photolithographic table top, exposure, development, deoxidation layer and other processes, and the marking, window, and table top graphics are engraved.
[0028] 4) Pre-diffusion treatment: chemically treat the s...
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