Preparation method of monocrystalline silicon corrodent and method for corroding convex silicon
A single-crystal silicon and etchant technology, applied in chemical instruments and methods, crystal growth, post-processing, etc., can solve the problems of inability to compensate for silicon convex corners, ecological pollution, etc., and achieve the effect of smooth silicon surface and stable corrosion rate
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[0020] refer to figure 1 , figure 1 It is a flow chart of the steps of a preparation method embodiment of a single crystal silicon etchant of the present invention, comprising the following steps:
[0021] Diluting step S110, diluting the tetramethylammonium hydroxide stock solution to form a tetramethylammonium hydroxide solution; adding step S120, adding fatty alcohol polyoxyethylene ether to the tetramethylammonium hydroxide solution; dissolving step S130, stirring The fatty alcohol polyoxyethylene ether is completely dissolved in the tetramethylammonium hydroxide solution to form the monocrystalline silicon etchant.
[0022] The embodiment of the present invention is characterized by adding fatty alcohol ethoxylate, an alcohol-based nonionic surfactant that is less harmful to the human body and the environment, into the TMAH solution. The TMAH solution after adding this surfactant has the following improvements to the corrosion characteristics of crystalline silicon:
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Embodiment 1
[0029] Step 1, diluting the TMAH stock solution to form a TMAH solution. Wherein, the quality of the tetramethylammonium hydroxide solution is 25% of the quality of the monocrystalline silicon etchant
[0030] Step 2, adding fatty alcohol polyoxyethylene ether to the prepared TMAH solution in step 1; wherein, the quality of fatty alcohol polyoxyethylene ether is 0.1% of the mass of single crystal silicon etchant
[0031] Step 3, stirring until the fatty alcohol polyoxyethylene ether is completely dissolved in the tetramethylammonium hydroxide solution to form the single crystal silicon etchant.
[0032] On the other hand, the present invention also provides a method for etching convex silicon with a single crystal silicon etchant: during silicon etching, the temperature of the single crystal silicon etchant is controlled within the range of 50°C to 85°C. Experiments have proved that the prepared monocrystalline silicon etchant has a good etching effect at 50°C, 85°C and sever...
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