Special fixture for micro electrode array on-line horizontal electrospark machining

Abstract

The invention relates to a special fixture for micro electrode array on-line horizontal electrospark machining, which comprises an electrode array square bar clamping mechanism, a fixture fixing mechanism and a support base. The special fixture is characterized in that a marble support (9) keeps the whole fixture in the working height position of a tool for electrode array machining; the electrode array square bar clamping mechanism comprises an upper fixing plate (1), an L-shaped lower fixing plate (3), fastening screws and nuts (4) and an adjusting block (5), an electrode array square bar (2) is clamped on the fixture by the upper fixing plate (1) and the L-shaped lower fixing plate (3) through the fastening screws and nuts (4), and the adjusting block (5) keeps the electrode array square bar (2) to stay at the same horizontal level with a workbench of the tool; and the fixture fixing mechanism comprises a fastening pressure plate (6), pressure plate bolts and nuts (7) and pretensioning bolts (8), the support base is the marble support (9), and the electrode array square bar clamping mechanism is fixed on the marble support (9) by the fastening pressure plate (6) through the pressure plate bolts and nuts (7) and the pretensioning bolts (8).

Description

technical field [0001] The invention relates to the clamping and fixing of workpieces and electrode materials during micro-array electrode electric discharge machining, and specifically provides a special supporting fixture for a processing device that processes micro-array electrodes by using an electrostatic induction feeding method. technical background [0002] Micro-array electrodes and array holes have always been the subject of much attention in the fields of ultra-precision and micro-fabrication technology. As people's demand for tiny devices such as tiny molds, tiny nozzles, and biomedical sensors increases, the processing capabilities of micro-array electrodes and array holes also need to be improved urgently. In the field of micromachining, there are generally LIGA, MEMS and micro-EDM processing methods, but due to the expensive processing costs of LIGA and MEMS and relatively limited processing objects, micro-EDM has become the preferred processing method. [00...

AI Technical Summary

Problems solved by technology

However, it is very difficult to re-clamp the micro-array electrodes processed on the wire cutting machine tool on the EDM machine tool, and the second clamping also makes it difficult to guarantee the position accuracy

For this reason, it is necessary to realize the integrated online machining of micro-array electrodes and array holes. In addition, the traditional EDM method is spindle vertical machining. Unstable, which affects the processing accuracy and processing quality of the array hole

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