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Variable rigidity beam, manufacturing method and actuating method thereof

A technology with variable stiffness, applied in the field of MEMS, can solve the problems of reducing device reliability, device design limitations, and poor anti-vibration performance, and achieve the effects of reducing internal stress, improving performance, and improving quality

Active Publication Date: 2010-09-15
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the actuation beams used in MEMS devices are all of a single stiffness. For devices, in general, the actuation beams with greater stiffness generally require a larger driving voltage to achieve the same deformation (such as displacement or torsion angle); Although the actuation beam with smaller stiffness requires a relatively low driving voltage, its anti-vibration performance is poor, which reduces the reliability of the device.
Therefore, it is often necessary to make a compromise design on the stiffness of the beam, and the device design is often limited by this

Method used

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  • Variable rigidity beam, manufacturing method and actuating method thereof
  • Variable rigidity beam, manufacturing method and actuating method thereof
  • Variable rigidity beam, manufacturing method and actuating method thereof

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Embodiment Construction

[0026] The variable stiffness beam proposed by the present invention and its preparation method and actuation method are described as follows in conjunction with the accompanying drawings and embodiments.

[0027] Such as figure 1 As shown, the variable stiffness beam according to one embodiment of the present invention includes: a frame structure 1; a filling part 2 nested in the frame structure 1; an insulating layer 3 located on the filling part 2; and an insulating layer located on the insulating layer 3 Heating part 4. Among them, the frame structure 1 is made of single crystal silicon material, or polycrystalline silicon, or gallium arsenide, or silicon carbide, or metal material; the filling part 2 is a low melting point material, and when the heating part 4 is heated, the filling part 2 can be solid, All or part of the liquid is converted, thereby changing the stiffness of the variable stiffness beam, in order to realize the core structure of the variable stiffness be...

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Abstract

The invention relates to a variable rigidity beam, a manufacturing method and an actuating method thereof. The variable rigidity beam comprises a frame structure, a filling part nested in the frame structure, an insulating layer positioned on the filing part and a heating component positioned on the insulating layer. The variable rigidity beam of the invention has the technical characteristics of monolithic integration and good adaptivity, wide application and high additional value, and can overcome the shortcomings in the existing technology.

Description

technical field [0001] The invention relates to the technical field of MEMS, in particular to a variable stiffness beam, a preparation method and an actuation method thereof. Background technique [0002] In MEMS (Micro-Electro-Mechanical Systems, Micro-Electro-Mechanical Systems) devices, beam actuation key components play a vital role in the precise mechanical motion operation of the device. At present, the actuation beams used in MEMS devices all have a single stiffness. For devices, in general, the actuation beams with greater stiffness generally require a larger driving voltage to complete the same deformation (such as displacement or torsion angle); Although the actuating beam with smaller stiffness requires a relatively low driving voltage, its anti-vibration performance is poor, which reduces the reliability of the device. Therefore, it is often necessary to make a compromise design on the stiffness of the beam, and the device design is often limited by this. In or...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00B81C1/00
Inventor 吴文刚张海霞陈庆华杜博超贾鲲鹏夏雨郝一龙
Owner PEKING UNIV
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