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Method for manufacturing metal oxide electrode and organci light emitting display using the same

An oxide and display technology, applied in the direction of electric solid device, metal material coating process, circuit, etc., can solve problems such as low sheet resistance and high light transmittance

Inactive Publication Date: 2010-06-09
LG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, in the related art using the ITO electrode as the anode electrode, the ITO electrode must be heat-treated at high temperature so that the ITO electrode has high light transmittance and low sheet resistance.

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  • Method for manufacturing metal oxide electrode and organci light emitting display using the same
  • Method for manufacturing metal oxide electrode and organci light emitting display using the same
  • Method for manufacturing metal oxide electrode and organci light emitting display using the same

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Embodiment Construction

[0018] Reference will now be made in detail to embodiments of the invention, examples of which are illustrated in the accompanying drawings.

[0019] An exemplary manufacturing method of the display device according to the embodiment will be described below.

[0020] figure 1 A dual target direct current (DC) sputtering system used to fabricate metal oxide electrodes is schematically shown. Such as figure 1 As shown, the dual-target DC sputtering system includes a diffusion pump pump1, a rotary pump pump2, and the like. The substrate sub and the two materials connected to the DC power supply unit are placed inside the chamber CH of the dual-target DC sputtering system.

[0021] In a dual-target DC sputtering system, such as oxygen (O 2 ), nitrogen (N 2 ), argon (Ar) gases are injected into the chamber CH, and DC power is applied to the two materials. Therefore, sources generated from these two materials are formed on the substrate sub.

[0022] The following will refer ...

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Abstract

A method of manufacturing a metal oxide electrode and an organic light emitting diode (OLED) display using the same are provided. The method includes providing a substrate inside a chamber, providing Al2O3 doped ZnO (AZO) including zinc oxide (ZnO) and aluminum oxide (Al2O3) inside the chamber, providing indium tin oxide (ITO) including indium oxide (In2O3) and tin oxide (SnO2) inside the chamber, and applying a direct current (DC) power to a material including AZO and ITO to form an IAZTO electrode on the substrate.

Description

technical field [0001] Embodiments of the present invention relate to a method of manufacturing a metal oxide electrode and an organic light emitting diode (OLED) display using the same. Background technique [0002] This application claims priority from Korean Patent Application No. 10-2008-102583 filed on October 20, 2008, the entire contents of which are hereby incorporated by reference. [0003] With the development of information technology, display devices have been widely used as a connection medium between users and information. Accordingly, the use of flat panel displays such as Liquid Crystal Displays (LCDs), Organic Light Emitting Diode (OLED) displays, Plasma Display Panels (PDPs) is increasing. [0004] Some display devices use transparent conductive oxide (TCO) electrodes. In the related art, indium tin oxide (ITO), which has excellent electrical and optical properties, is mainly used as a material of an oxide electrode because ITO has high light transmittanc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H01L21/82H01L27/32H01L51/50H01L51/52
CPCC23C14/086H01L51/442C23C14/3464Y02E10/549Y02P70/50H10K30/82H01L31/022475H01L31/022483
Inventor 李在暎梁熙皙裵孝大金汉基
Owner LG DISPLAY CO LTD
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