Roll-to-roll plasma device for enhancing chemical vapor deposition

Abstract

The invention relates to a roll-to-roll plasma device for enhancing chemical vapor deposition, which is characterized in that the device comprises a roll-out roller (2), a winding roller (11), a heating cavity (15), a vertical transmission rail (3), a rail (16), tension pulley groups (4,6,13) and a cooling roller (12), wherein the rail (16) connected with a horizontal transmission rail (20) and arranged in a vacuum chamber (22) is used for feeding deposited flexible matrix material into the winding roller (11); the tension pulley groups (4,6,13) are respectively arranged in a vacuum chamber (1), the vacuum chamber (22) and the heating chamber (15) and used for keeping the tensile force of the matrix material in the transmission process, and the cooling roller (12) is arranged in the vacuum chamber (22) and used for cooling the deposited flexible matrix material loaded on the winding roller (11). The device greatly improves the transport efficiency of the flexible matrix in the vacuum cavity, furthermore accurately controls the surface tension of the matrix at high temperature conveniently, and greatly reduces the phenomenon of uneven surface of the flexible matrix caused by thermal contraction at high temperature.

Description

technical field [0001] The invention relates to a chemical deposition device, in particular to a flexible substrate, such as a chemical deposition device on substrates such as stainless steel, polymers and fibers, specifically a roll-to-roll plasma enhanced chemical vapor deposition device, It can also be used to prepare silicon-based thin film solar cells. Background technique [0002] As we all know, the roll-to-roll device is a new type of equipment widely used in industrial production. As the world enters a new era of rapid development of electronic information and new energy industries. It has become a new type of high-efficiency production equipment for these emerging high-tech industries, such as in the field of printed circuit boards, the field of flexible matrix solar cells, and the field of flexible and convenient electronic devices. With its simple preparation process, the production efficiency in these fields can be greatly improved, and the production cost of t...

AI Technical Summary

Problems solved by technology

For flexible substrates, due to the thermal shrinkage effect and variable characteristics under heating, if there is no external force to give a certain balance tension control, flexible substrates such as polymer substrates will be deflected, resulting in the failure of coating or serious damage to the coating. Inhomogeneity

In addition, for flexible substrates, due to their softness and variability, if the technology that usually deals with rigid substrates is used, many difficulties will be encountered in practice and the required effects will not be achieved.

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