Method for plating tantalum on TiNi alloy surface
A technology of alloy and coating machine, which is applied in the field of tantalum plating on the surface of alloys, and can solve problems such as poor corrosion resistance
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specific Embodiment approach 1
[0008] Specific Embodiment 1: The method for plating tantalum on the surface of TiNi alloy in this embodiment is realized according to the following steps: 1. Mechanically polish the TiNi alloy, then put it into acetone for ultrasonic cleaning for 20-60 minutes, and then dry it; 2. TiNi after drying The alloy is put into the multi-arc ion coating machine, and the vacuum is evacuated until the pressure of the multi-arc ion coating machine is 10 -4 ~10 -5 Pa, and then introduce argon gas until the pressure in the furnace is 0.2-0.3Pa, apply a negative bias voltage of 800-1100V to the TiNi alloy, and perform sputtering cleaning until the TiNi alloy reaches 300-400°C; Under the conditions of 70-80A and negative bias of 100-500V, bombard the TiNi alloy treated in step 2 with tantalum ions and deposit it. The deposition time is 30-160min, and then cool to room temperature; 4. Vacuum at 800-1000°C Anneal for 30 to 90 minutes to obtain a tantalum-plated TiNi alloy.
specific Embodiment approach 2
[0009] Embodiment 2: The difference between this embodiment and Embodiment 1 is that in step 1, ultrasonic cleaning is performed for 30-50 minutes. Others are the same as in the first embodiment.
specific Embodiment approach 3
[0010] Embodiment 3: The difference between this embodiment and Embodiment 1 is that in step 1, ultrasonic cleaning is performed for 40 minutes. Others are the same as in the first embodiment.
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