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Micro-machine overhang beam simultaneously implementing driving and self-cleaning with single integrated resister

A technology integrating resistors and cantilevers, applied in the field of micromechanical sensors, can solve the problems of unfavorable portable sensors, bulky equipment, and increase the complexity of devices, and achieve the effect of optimizing the selection of driving current, simplifying the structure, and excellent performance.

Inactive Publication Date: 2009-07-29
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This approach requires bulky equipment, which is not conducive to portable sensors
Increasing the temperature is also an effective method, which often requires adding a heating component to the cantilever beam, which increases the complexity of the device

Method used

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  • Micro-machine overhang beam simultaneously implementing driving and self-cleaning with single integrated resister
  • Micro-machine overhang beam simultaneously implementing driving and self-cleaning with single integrated resister
  • Micro-machine overhang beam simultaneously implementing driving and self-cleaning with single integrated resister

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Example 1: Streptavidin biosensor

[0036] An implementation example of detecting streptavidin is used to illustrate the performance of the sensor of the present invention in detail.

[0037] The scanning electron microscope photograph of the cantilever beam is shown as Figure 4 shown. Its size is 300 μm × 100 μm × 3 μm, the size of the driving resistor is 2.12 kΩ, and the size of the gold film is 94 μm × 45 μm × 0.05 μm. The working principle of the sensor is as follows: Molecules self-assemble on the surface of the gold film to form a layer of GOPS (glycidoxytrimethoxysilane) film, and then cover the rest of the cantilever beam with a layer of PEG (polyethylene glycol) molecules to Inhibition of non-specific adsorption, followed by self-assembled growth of biotin on GOPS film as a sensitive membrane for specific adsorption of streptavidin. When the sensor is immersed in a solution containing streptavidin, streptavidin will be specifically adsorbed to the surface o...

Embodiment 2

[0046] Example 2: DMMP chemical sensor

[0047] This embodiment takes the detection of saturated DMMP (dimethyl phosphonate) gas as an example to describe in detail the application of the present invention in chemical gas detection and its self-cleaning function.

[0048] DMMP is a simulant of sarin gas. Sarin is a dangerous substance with great harm. It has been used in terrorist attacks and caused serious consequences. Effective detection of sarin gas will provide technical support for security checks and anti-terrorism at transportation hubs and important locations such as airports, stations, ports, and customs, and is of great significance to ensuring public safety.

[0049] Each design of the sensor is the same as that of Embodiment 1, except that the sensitive film deposited on the gold film is different. The sensor first grows a layer of hyperbranched polymer on the gold film, and then grows a DMMP-sensitive head group on it. The fabrication process of the device is ...

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Abstract

The invention relates to a structure of a micromechanical cantilever for simultaneously realizing driving and self-cleaning by utilizing a single integrated resistor, and a manufacturing method and application thereof, and belongs to the field of micromechanical sensors. The invention is characterized in that an integrated driving resistor is manufactured on the surface of the fixed end of the cantilever, and a sensitive film with specific recognition is deposited on the surface of the free end of the cantilever. When a certain AC-DC overlap current is applied on the driving resistor, the current can drive the cantilever to reach a resonance condition, so that the cantilever serves as a sensor to detect a specific chemical substance. When the detection is finished, the driving resistor serves as a heater to increase the temperature of the cantilever by increasing the current applied on the driving resistor so as to accelerate the desorption of the adsorbed chemical substance, realize the self-cleaning of the sensor, and realize quick repeated detection. The invention has the characteristics of simple structure, convenient manufacture and easy realization.

Description

technical field [0001] The invention relates to a structure, a manufacturing method and an application of a micromechanical cantilever beam which realizes driving and self-cleaning simultaneously by using a single integrated resistor. The invention belongs to the field of micromechanical sensors. Background technique [0002] Sensors are the basis of measuring instruments and detection systems. Traditional sensors measure non-electric quantities such as pressure, temperature, and displacement by changing electrical quantities such as resistance, capacitance, or inductance, and output them as voltage and current signals. An A / D converter needs to be added between the sensor and the control circuit, which not only reduces the reliability, response speed and measurement accuracy of the system, but also increases the cost. The output of the resonant sensor is a frequency signal, with high precision and resolution, and good long-term stability. It can be interfaced with a compu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02B81C1/00B81C5/00G01N5/02G01D5/12
Inventor 于海涛李昕欣李俊纲许鹏程杨天天
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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