Constant temperature keeping device

Abstract

This invention provides a constant temperature controller capable of processing the sharp temperature change of an external heat load, high heat responsiveness and controlling temperature with high precision. A cool fluid of a predetermined temperature is supplied to a three-way valve (20) of a sub unit (2) from a cooling side tank (43) of a main unit (1) of a controller, through a supply pipe (14). Hot fluid of a predetermined temperature is supplied to the three-way valve (20) from a heating side tank (44) through another supply pipe (15). The cool and hot fluids are mixed in a predetermined ratio by the three-way valve (20) according to a temperature of the external heat load (7), and supplied to a heat exchange chamber of the external heat load (7), to maintain the temperature thereof at a target temperature. The temperature of the external heat load (7) is measured by one of a sensor (72) in a processing chamber, a sensor (23) in a constant temperature fluid supply pipe, and a sensor (24) in a constant temperature fluid return pipe, for feedback control of aperture of the three-way valve (20).

Description

technical field [0001] The present invention relates to a constant temperature maintaining device for maintaining a constant temperature of an external heat load device, and more particularly to a device for maintaining a constant temperature of an external heat load device by circulating a liquid heat medium at a constant temperature, such as a refrigeration device used in a semiconductor manufacturing device, etc. Constant temperature maintenance device. Background technique [0002] As next-generation semiconductor devices, advanced semiconductor manufacturers are advancing the development of microprocessors in a 45nm process. In this manufacturing process, in order to keep constant the temperature of a plasma etching device with a large thermal load, etc., a large-scale, high-precision, and especially high-thermal-responsive temperature control device is required. As a temperature control device, a constant temperature maintaining device called a refrigeration device is...

AI Technical Summary

Problems solved by technology

However, the heat conduction speed of the cold medium gas (Freon gas, etc.) in the refrigeration cycle system of the cooler is slow, so it often happens that the set temperature is greatly exceeded (overshoot), or the set temperature is greatly lower than the set temperature. (low-key downshoot) case

This increases the burden on the heater, requiring a large heater capable of temperature adjustment over a wide temperature range

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