Plane light integrated reconfigurable optical add-drop multiplexer
An optical add-drop multiplexer, planar light technology, applied in wavelength division multiplexing systems, optical waveguides and light guides, etc., can solve the problems of non-repeatable optical add-drop multiplexers, practical and economic limitations, channel reorganization, etc. Achieve the effect of being suitable for mass production, compact device structure and high detection accuracy
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[0039] The processing technology of the present invention adopts the multi-layer wafer semiconductor processing technology and technology of silicon-based deposition of silicon dioxide and sputtered metal film, such as figure 1 As shown, it consists of a waveguide optical core (1), a gasket (2), a silicon-based wafer (3), a cover cladding layer (4), a heating layer (5), a conductive layer (6), a protective layer (7) and A deep etching groove (8) is formed, and the process steps are as follows: in the first step, a chemical vapor deposition method is used to deposit a liner (2) and a waveguide optical core (1) on the silicon-based wafer (3); in the second step , using reactive ion etching technology to form the designed planar waveguide optical path; the third step, on the liner (2) and the waveguide optical core (1), re-deposit silicon dioxide to cover the cladding (4); the fourth step , using a metal film sputtering process to generate a heating layer (5) and a conductive lay...
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