Minisize multifunctional optical devices and method for making same

Abstract

The invention relates to a micro multifunctional optical device and a method for making the same. The optical device is characterized in that: the optical device comprises a fixed electrode, a movable electrode, a support beam, an anchor point, a glass substrate, a light reflection module and optical fiber grooves; the head of the light reflection module is in a triangular shape; an input opticalfiber groove is arranged over against the head of the reflection module; corresponding to the reflection surfaces on two sides of the triangular light reflection module, tow output optical fiber grooves are oppositely arranged to be perpendicular to the input optical fiber groove; input optical fiber and output optical fiber are respectively arranged in the input optical fiber groove and the output optical fiber grooves. The optical device realizes adjustable light splitting function and optical switching function through a comb type electrostatic driver moving light reflection module consisting of the fixed electrode and the movable electrode, and realizes light attenuation function through a flat-type electrostatic driver twisted light reflection module consisting of the fixed electrodeand the movable electrode at the same time. The optical device is simple in making process and compatible with MEMS device process of various species, and can be used to realize the glimmer integration systems with more powerful functions.

Description

A kind of miniature multifunctional optical device and its preparation method technical field The invention relates to a multifunctional optical device and a preparation method thereof, in particular to a miniature multifunctional optical device with the mixed functions of adjustable light splitting, optical switch and variable optical attenuator and a preparation method thereof. Background technique Tunable optical splitters, optical switches, and variable optical attenuators realized by microelectromechanical systems (MEMS) technology have the advantages of small size, light weight, low energy consumption, and stable performance. With the rapid development of optical fiber communication technology and dense wavelength division multiplexing systems, MEMS tunable optical splitters, optical switches and variable optical attenuators, as important optical waveguide devices, have been more and more widely used. There have been many reports on the research on MEMS tunable optic...

AI Technical Summary

Problems solved by technology

This will increase the cost of equipment, reduce system reliability, increase the difficulty of system maintenance and is not conducive to the miniaturization of equipment

Images