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Vertical Bridgman growth furnace and method of optimizing temperature field inside furnace

A vertical Bridgeman, growth furnace technology, applied in chemical instruments and methods, crystal growth, single crystal growth, etc. To solve the problem of component supercooling, increase the axial temperature gradient, and achieve the effect of small fluctuation

Active Publication Date: 2010-05-19
IMDETEK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] ①Technical problem to be solved: In order to overcome the shortcomings of the prior art vertical Bridgman growth furnace, when growing crystals, the high temperature zone and the low temperature zone are difficult to control and the axial temperature gradient is small, the present invention provides a vertical Bridgman growth furnace. The growth furnace adopts a five-stage modular design, and is equipped with high-temperature alloy liners, heat sinks, and ceramic bushings, which can solve the phenomenon of component overcooling caused by small axial temperature gradients and large thermal stresses. Defects can reduce the thermal stress in the crystal while obtaining a large growth rate, and improve the crystallization quality of the crystal

Method used

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  • Vertical Bridgman growth furnace and method of optimizing temperature field inside furnace
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  • Vertical Bridgman growth furnace and method of optimizing temperature field inside furnace

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Effect test

Embodiment 1

[0016] Embodiment 1: refer to figure 2 The vertical Bridgman growth furnace of the present invention includes a furnace cover 1, a heating wire 4, a liner 5, a cooling fin 6, and a casing 7, and also includes a type I heating module 8, a type II heating module 8', and a heat shield 9 , bushing 10 and refractory ceramic wool 11. In the shell 7, from bottom to top, there are heat insulation boards 9, two sets of I-type heating modules 8, heat sinks 6, one set of II-type heating modules 8', two sets of I-type heating modules 8, and furnace cover 1, heat insulation boards The center hole of 9 is refractory ceramic wool 11, and the central position of the five-section heating module is two sections of liner 5, the lower end of the lower section of liner 5 is flush with the heat shield 9, the upper end of the upper section of liner 5 is flush with the furnace cover 1, and the two The section liner 5 is separated by cooling fins 6, and there is a liner 10 outside the joint of the l...

Embodiment 2

[0017] Embodiment 2: Designing a suitable five-section modular tube resistance furnace to grow Cd 0.9 Zn 0.1 Te boule.

[0018] First place a heat shield 9 with an outer diameter of 450mm and a central aperture of 120mm and a height of 150mm at the lowermost end of the shell 1. During crystal growth, refractory ceramic wool 11 is used to seal the central aperture to prevent the flow of atmosphere from affecting the temperature field. Place two I-type heating modules 8 with an outer diameter of 450mm and a central aperture of 120mm and a height of 220mm on it, and then symmetrically place three fan-shaped superalloy heat sinks with a thickness of 3mm, and place a high-temperature alloy tube with an inner diameter of 90mm, a wall thickness of 3mm, and a length of 450mm The liner 5 is placed at the center hole of the module, and an alumina ceramic bushing 11 with an inner diameter of 90 mm, a wall thickness of 5 mm, and a height of 60 mm is placed on it as a thermal insulation ...

Embodiment 3

[0022] Example 3: Growth of Cd using a five-section modular tubular resistance furnace 0.8 mn 0.2 Te boule.

[0023] First, a heat shield 9 with an outer diameter of 400 mm and a central aperture of 90 mm and a height of 150 mm is placed at the lowermost end of the shell 1. During crystal growth, refractory ceramic wool 11 is used to seal the central hole to prevent the flow of the atmosphere from affecting the temperature field. Place two I-type heating modules 8 with an outer diameter of 400 mm and a central aperture of 90 mm and a height of 200 mm on it, and then symmetrically place four fan-shaped high-temperature alloy heat sinks with a thickness of 3 mm, and place a high-temperature alloy tube with an inner diameter of 70 mm, a wall thickness of 3 mm, and a length of 400 mm. The liner 5 is placed at the central hole of the module, and an alumina ceramic bushing 11 with an inner diameter of 70 mm, a wall thickness of 5 mm, and a height of 70 mm is placed on it as a therma...

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Abstract

The invention discloses a vertical Bridgman growth furnace. From the bottom up, the inside of an outer shell of the furnace is provided with a thermal insulating board, two groups of I type heating modules, a cooling fin, a group of II type heating modules, two groups of I-type heating modules and a furnace hearth cover. The center hole of the thermal insulating board is filled with fireproof ceramic cotton, and the center of five sections of heating modules is provided with two sections of liner tubes which are separated by the cooling fin, and the outside of the joint of the liner tubes is provided with a liner sleeve, and the surrounding of the center hole of each group of heating modules is provided with an electric heated wire of each separate temperature control system, and a Pt / PtRh10 thermocouple is arranged in the radical direction, being in the middle of the outer wall which is vertical to the outer wall of each group of modules, and the temperature measuring contact of the thermocouple is close to the outer wall of the liner tube 5. The invention also discloses the optimization method of the temperature field of the vertical Bridgman growth furnace. As the vertical Bridgman growth furnace adopts the design of five sections of modules, adjustable temperature field for growing various crystals can be obtained by changing different modules, thus solving the problem of constitutional super cooling caused by small axial temperature gradient.

Description

technical field [0001] The invention relates to a vertical Bridgman growth furnace, and also relates to a method for optimizing the temperature field in the vertical Bridgman growth furnace. Background technique [0002] refer to figure 1 , Document 1 ""Crystal Growth Science and Technology" (Volume 1), edited by Zhang Kecong, 1997: 506-520" discloses a vertical Bridgman growth furnace, its main structure is: in the stainless steel shell 7 are two Ceramic liner pipes 5 with the same segment size, electric heating wires 4 are wound around the outer periphery of the ceramic liner pipes 5, and the electric heating wires 4 are externally connected to a corresponding temperature control system. The ceramic liner 5 and the stainless steel shell 7 are filled with refractory materials, and the two sections of ceramic liner 5 are separated by ceramic cooling fins 6 to form an upper furnace cavity 2 and a lower furnace cavity 3, and the upper furnace cavity is a furnace cover 1 . D...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B11/00
Inventor 介万奇徐亚东王涛刘伟华杨戈张继军
Owner IMDETEK
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