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Method for preparing premelting lanthanum titanate crystalloid steam plating material

An evaporation material, a technology of lanthanum titanate, which is applied in the field of preparing pre-melted lanthanum titanate crystalline evaporation materials, can solve the problems of increasing the coating cycle and increasing the production cost, and achieves shortening the cycle, saving the growth cost and achieving good repeatability. Effect

Inactive Publication Date: 2008-06-18
昆山光铭光电子元件有限公司
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Problems solved by technology

The vapor deposition materials prepared by these technologies must be fully melted in the vacuum coating chamber before starting the vapor deposition to prevent the splashing of tiny particles and eliminate the residual gas contained in the material, which undoubtedly increases the coating cycle. increase production cost

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  • Method for preparing premelting lanthanum titanate crystalloid steam plating material

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Embodiment Construction

[0015] Prepared La 2 o 3 (8-70%) and TiO 2 (30-92%) mixed oxide powder is placed in a vacuum furnace (with a cold crucible inside), at ≤1*10 -2 The mixed oxide powder is heated to 1800°C-2500°C by a high-frequency source under Pa vacuum, melted in a cold crucible of a vacuum furnace and supplemented with a deep-low temperature trap trap of ≤-100°C to trap the powder in the powder Moisture and other residual gases are simultaneously cooled by slow precipitation (falling speed 5-10mm / hr), and finally a pre-melted crystalline lanthanum titanate product is obtained.

[0016] Since the lanthanum titanate mixed oxides are refractory high-temperature materials, they cannot be melted and grown in a crucible made of high-melting-point metal materials. Therefore, the present invention directly uses the lanthanum titanate mixed oxide raw material itself as the crucible material, and uses a high-frequency power supply in the vacuum chamber to fully melt the inside, while the outside is...

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Abstract

A pre-melted lanthanum titanate vapor plating material preparation method is provided. Firstly, lanthanum titanate mixed oxide powder is configured, which consists of 8 to 70 percent of La2O3 and 30 to 92 percent of TiO2 according to the weight percentage. The mixed oxide powder is arranged in a vacuum furnace cold crucible. Under the high vacuum (less than or equal to 1*10<-2>Pa), high frequency source is heated to 1800-2500 DEG C to form lanthanum titanate molten mass. The lanthanum titanate molten mass is cooled through slow settlement to form the pre-melted lanthanum titanate sparry vapor plating material. Water vapor and residue gas during the preparation process are trapped through a cold trap. The deep cold temperature is less than or equal to 100 DEG C below zero. The invention uses a high vacuum high frequency cold crucible slow settlement crystal growth method to prepare the pre-melted mixed oxide to be used as initial material with high purity and density used for vapor plating advanced optical films.

Description

technical field [0001] The invention belongs to the technical and scientific fields of preparation of evaporation coating materials, in particular to a method for preparing pre-melted lanthanum titanate crystalline evaporation materials. Background technique [0002] The increasingly rapid development of the application field of optical coating and the subsequent demand for higher performance have prompted the simultaneous development of evaporation materials and their films. For example, in the emerging optoelectronics industry, products such as digital display screens, imaging and projection systems, and precision filters for communications are increasingly developing in the direction of high brightness, high definition, ultra-large area, and ultra-fine structure, requiring optical thin films It has stable refractive index, high light transmittance, high density and high purity, etc. In addition to strictly controlling the coating process, the evaporation starting materia...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/06
Inventor 许士荣
Owner 昆山光铭光电子元件有限公司
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