Semiconductor structure and forming method thereof
A semiconductor and entity technology, applied in semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., can solve problems such as coarse side effects of the upper cover layer, and achieve the effect of improving mechanical strength and increasing impedance
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[0045] A preferred embodiment of the present invention is illustrated by FIGS. 1 to 9, wherein like reference numerals indicate similar elements.
[0046] Please refer to FIG. 1 , which shows an upper cap layer 22 and a metal hard mask 24 formed on a low-k dielectric layer 20, which are used to insulate underlying components (not shown) and to be formed later. metal wires. The low-k dielectric layer 20 has a low k, preferably less than 3.5 and more preferably less than 2.5, and is therefore sometimes referred to as an extremely low-k dielectric material. The low-k dielectric layer 20 may include carbon-doped silicon oxide, fluorine-doped silicon oxide, organic low-k material, porous low-k material, and the like. The low-k dielectric layer 20 can be formed by, for example, spin coating, chemical vapor deposition, plasma enhanced chemical vapor deposition, low pressure chemical vapor deposition, and other known deposition techniques.
[0047] A capping layer 22 is then formed ...
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