Chip oxygen sensor and its preparation method
An oxygen sensor, a chip technology, applied in the field of automotive chip zirconia oxygen sensor and its preparation, can solve the problems of difficulty in meeting exhaust emission requirements, slow response speed, complex structure, etc., to reduce poisoning failure, The effect of fast response speed and faster response speed
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[0032] With reference to Fig. 1, provide a kind of chip type oxygen sensor and preparation method thereof, chip type oxygen sensor comprises heater (9) and oxygen sensitive probe (13), and heater (9) comprises heater substrate (1), is located at heating The insulating layer (2) on the upper part of the base body (1) and several heating bodies (3) arranged inside the insulating layer (2), the oxygen sensitive probe (13) includes the reference gas channel body arranged on the upper part of the heater (9) (4), the zirconia sensitive substrate (6) arranged on the upper part of the reference gas channel body (4), the external electrodes (8) and the internal electrodes (7) respectively arranged on the upper and lower surfaces of the zirconia sensitive substrate (6), each The two ends of the heating body (3) respectively extend outward and converge to form two conductive pins (12) at the lower part of the heater base (1), and a porous protective layer (10) is provided on the upper sur...
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