Plasma processing system
A plasma and treatment device technology, applied in the field of plasma treatment devices, can solve problems such as contamination particles, and achieve the effect of suppressing the generation of particles and uniform plasma treatment
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[0034] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following embodiments, an ICP (Ion Coupled Plasma) mode dry etching device is used as an example of a plasma processing device for description. However, the present invention is not limited to the following examples, and is also applicable to dry etching modes other than the ICP mode. Furthermore, the present invention is applicable not only to dry etching apparatuses but also to sputtering apparatuses, CVD (Chemical Vapor Deposition) apparatuses, and the like that perform plasma processing.
[0035] Below, refer to figure 1 The dry etching apparatus 30 according to the embodiment of the present invention will be described. here, figure 1 It is a schematic configuration diagram of the dry etching apparatus 30 of the present invention.
[0036] The dry etching device 30 includes: a processing chamber 10 , an exhaust device 20 , and high frequency pow...
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