Diamond Uses/Applications Based on Single-Crystal CVD Diamond Produced at Rapid Growth Rate
a technology of diamond and single crystal, which is applied in the field of diamond use/application, can solve the problems of limiting the applicability of sc-cvd diamonds produced so far, affecting the applicability of diamond-based electronics, and affecting the application of diamonds, etc., and achieves the effect of rapid growth rate and rapid growth ra
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[0101]A diamond growth process was conducted in the above-described MPCVD chamber in FIG. 1. First, a commercial 3.5×3.5×1.6 mm3 high pressure high temperature (HPHT) synthetic type Ib diamond seed was positioned in the deposition chamber. The diamond seed has polished, smooth surfaces that were ultrasonically cleaned with acetone. The deposition surface was within two degrees of the {100} surface of the diamond seed.
[0102]Then, the deposition chamber was evacuated to a base pressure of 10−3 torr. The infrared pyrometer 142 was focused though a quartz window at an incident angle of 65 degrees on the growth surface of the diamond and had a minimum 2 mm2 diameter spot size. Diamond growth was performed at 160 torr pressure using gas concentrations of 15% O2 / CH4, and 12% CH4 / H2. The process temperature was 1020° C., and gas flow rates were 500 sccm H2, 60 sccm CH4, and 1.8 sccm O2. Deposition was allowed to continue for 12 hours.
[0103]The resulting diamond was 4.2×4.2×2.3 mm3 unpolishe...
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