Acoustic boundary wave device
a boundary wave and acoustic wave technology, applied in the direction of electrical transducers, generators/motors, devices material selection, etc., can solve the problems of increasing the cost of surface acoustic wave devices, reducing the second medium layer, and reducing the size of acoustic wave devices. , to achieve the effect of superior frequency characteristics
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[0110] The present invention will be further described in detail by way of specific preferred embodiments with reference to the drawings.
[0111] The present inventors conducted a numerical analysis to find the cause of the above-described spurious responses. This numerical analysis was based on the method disclosed in the literature “A Method For Estimating Optimal Cuts and Propagation Directions For Excitation and Propagation Directions For Excitation of Piezoelectric Surface Waves” (J. J. Campvell and W. R. Jones, IEEE Trans. Sonics and Ultrasonics, Vol. SU-15 (1968), pp. 209-217). In this analysis, the displacements and the vertical stress at the interfaces between SiO2 and Au and between the Au and LiNbO3 were continuous, and the potential was 0 by the short-circuited interfaces. The SiO2 had a predetermined thickness and the thickness of the 15° Y—X propagating LiNbO3 was unlimited. The displacement distribution of the boundary waves and spurious modes were thus examined.
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