Substrate for carrying a semiconductor chip and a manufacturing method thereof

Abstract

A substrate includes a plurality of insulation layers forming a laminated structure and a built-in capacitor formed in the laminated structure, wherein the laminated structure includes a layer of baked organic polysilane.

Description

CROSS-REFERENCE TO RELATED APPLICATION [0001] The present application is based on Japanese priority application No. 2002-314695 filed on Oct. 29, 2002, the entire contents of which are hereby incorporated by reference. BACKGROUND OF THE INVENTION [0002] The present invention generally relates to semiconductor devices and more particularly to a substrate for carrying a semiconductor chip and a manufacturing method thereof. Further, the present invention is related to a semiconductor device that uses such a substrate. [0003] With sharp increase of clock frequency in recent advanced semiconductor devices, supply of a stable electric power to semiconductor chip is becoming a paramount problem. In order to deal with this problem, there is a proposal to provide a capacitor on a substrate on which the semiconductor chip is mounted. [0004]FIG. 9 shows a conventional semiconductor device 10. [0005] Referring to FIG. 9, the semiconductor device 10 includes a substrate 11 mounted with a semico...

AI Technical Summary

Benefits of technology

[0011] Another and more specific object of the present invention is to provide a chip-mounting substrate having a built-in capacitor wherein the thickness, and hence inductance, of the substrate is reduced.

[0016] According to the present invention, the capacitor is formed close to the surface on which the semiconductor chip is mounted, and the effect of inductance is minimized. Thereby, a stable power supply becomes possible from the substrate to the semiconductor chip mounted thereon. Because the capacitor, acting as a decoupling capacitor, is formed integral with the substrate, there is no need of mounting a separately manufactured capacitor on the substrate, and the process of manufacturing the semiconductor device is significantly simplified.

[0017] By forming the capacitor close to the chip-mounting surface on which a semiconductor chip is mounted, the effect of inductance on the power feeding path for feeding electric power to the semiconductor chip mounted on the substrate is minimized, and stable electric power feeding becomes possible to the semiconductor chip with stabilized voltage even in the case the clock frequency for driving the semiconductor chip is increased.

[0021] According to the present invention, the capacitor is formed integrally with the laminated structure and a built-in decoupling capacitor is obtained easily and efficiently in the laminated structure.

[0022] Particularly, it becomes possible to use a high temperature process at the time of forming the decoupling capacitor by using a baked organic polysilane film for the foregoing insulation layers. It should be noted that a baked organic polysilane film shows excellent endurance to a high temperature process. Further, by using a baked organic polysilane film for the insulation layer, the thermal expansion coefficient of the laminated structure can be adjusted to be generally equal to the thermal expansion coefficient of the semiconductor chip mounted on the substrate by controlling the baking process, and occurrence of thermal stress is minimized between the semiconductor chip and the chip-mounting surface.

Problems solved by technology

With sharp increase of clock frequency in recent advanced semiconductor devices, supply of a stable electric power to semiconductor chip is becoming a paramount problem.

In other words, the semiconductor device 10 has a drawback in that reduction of the inductance between the decoupling capacitor 14 and the semiconductor chip 12 mounted on the substrate 11 is difficult.

Associated with this drawback, there arises a problem that supply of stabilized electric power, particularly the supply of stabilized voltage, to the semiconductor chip becomes difficult because of the existence of the inductance.

This problem becomes particularly serious in recent high-speed semiconductor devices in which the semiconductor chip is driven at a very high clock speed.

Because of such a construction, the conventional semiconductor device 10 shown in FIG. 9 has suffered from the problem of complex manufacturing process and the associated problem of high manufacturing cost.

Associated with the use of such a silicon substrate, there arises a problem that a dicing process becomes necessary for separating the capacitor components 14 formed on a common silicon substrate, while such a dicing process also increases the cost of the substrate 11.

Further, associated with the use of silicon substrate for the silicon film 15, there arises a problem in the semiconductor device 10 in that the decoupling capacitor 14 cannot be formed as thin as desired, and because of this, the thickness of the substrate 11 has been increased.

However, formation of such a depression 18 makes the manufacturing process and structure of the substrate 10 very complex.

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