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Radiation-sensitive composition, multilayer body and method for producing same, and electronic component

A technology of radiation and composition, which is applied in the fields of radiation-sensitive composition, laminate and its manufacture, and electronic components, which can solve problems such as reducing uneven coating and affecting the dissolution stability of resin films, and achieves excellent electrical characteristics and dissolution The effect of excellent stability

Active Publication Date: 2007-05-02
ZEON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, these radiation-sensitive resin compositions cannot sufficiently cope with the higher performance required of radiation-sensitive resin compositions with the miniaturization, thinning, and high performance of devices in recent years, specifically, those that affect the uniformity of the resin film. Solution stability or reduction of coating unevenness affecting light interference

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0112]Hereinafter, the present invention will be described more specifically with reference to synthesis examples and examples. In addition, parts and % in each example are based on mass unless otherwise specified.

[0113] In addition, each characteristic was evaluated by the following method.

[0114] [Weight average molecular weight (Mw) and number average molecular weight (Mn) of polymer]

[0115] The polyisoprene-equivalent molecular weight was determined using gel permeation chromatography.

[0116] [Hydrogenation rate]

[0117] The hydrogenation rate is passed 1 The H-NMR spectrum is obtained as the ratio of the number of moles of hydrogenated carbon-carbon double bonds to the number of moles of carbon-carbon double bonds before hydrogenation.

[0118] [iodine value]

[0119] Measured in accordance with JIS K0070B.

[0120] [Solvent Safety]

[0121] LD obtained from the acute toxicity test of oral administration of the solvent to rats using the following criteria...

Synthetic example 1

[0139] 60 parts of 8-carboxytetracyclo[4.4.0.1 2，5 .1 7，10 ] dodec-3-ene, 40 parts of N-phenyl-(5-norbornene-2,3-dicarboxyimide), 1.3 parts of 1-hexene, 0.05 parts of 1,3-dimethyl Imidazolidine-2-indene (tricyclohexylphosphino)benzylidene ruthenium dichloride and 400 parts of tetrahydrofuran were added to a pressure-resistant glass reactor replaced with nitrogen, and reacted at 70°C while stirring for 2 hours, a polymer solution A (solid content concentration: about 20%) was obtained.

[0140] A part of this polymer solution A was transferred to an autoclave with a stirrer, and hydrogen was dissolved at a pressure of 4 MPa at 150° C. and reacted for 5 hours to obtain a polymer solution B containing a hydrogenated polymer (hydrogenation rate 100%) (Concentration of solid content: about 20%).

[0141] A heat-resistant container in which 1 part of activated carbon powder was added to 100 parts of polymer solution B was placed in an autoclave, and hydrogen gas was dissolved at ...

Embodiment 1

[0143] 100 parts of the polymer obtained in Synthesis Example 1, 550 parts of diethylene glycol ethyl methyl ether as a solvent, and 25 parts by weight of 4,4'-[1-[4 as a 1,2-quinonediazide compound were mixed. -[1-[4-Hydroxyphenyl]-1-methylethyl]phenyl]ethylene]bisphenol (1 mole) and 1,2-naphthoquinonediazide-5-sulfonyl chloride (2.5 moles ), 20 parts of polyfunctional epoxy compound with alicyclic structure (molecular weight 2700, epoxy group number 15, manufactured by Daicel Chemical Industry Co., Ltd., EHPE3150) as crosslinking agent, 1 part of γ - Glycidoxypropyltrimethoxysilane and 0.05 parts of polysiloxane-based surfactant (manufactured by Shin-Etsu Chemical Co., Ltd., KP-341) were dissolved, The manufactured filter is filtered to prepare a radiation-sensitive composition. Dissolution stability, coating unevenness, and dielectric constant were evaluated for this radiation sensitive composition. The results are shown in Table 1.

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Abstract

Disclosed is a very safe radiation-sensitive composition having excellent electrical characteristics and good solution stability which is able to form a coating free from unevenness. Also disclosed are a multilayer body wherein a resin film is formed on a substrate by using this radiation-sensitive composition, and a method for producing such a multilayer body. A radiation-sensitive composition containing a cyclic olefin polymer having a polar protic group, a radiation-sensitive compound, a crosslinking agent and a solvent is characterized in that the solvent contains a dialkylene glycol dialkyl ether having two different alkyl groups in one molecule. A multilayer body comprises a substrate and a resin film formed on the substrate using the above-described radiation-sensitive composition.

Description

technical field [0001] The present invention relates to a radiation-sensitive composition and a laminate having a resin film obtained from the radiation-sensitive composition on a substrate. A sensing composition, a laminate having a resin film obtained from the reflective line sensing composition on a substrate, a method for producing the same, and an electronic component including the laminate. Background technique [0002] In electronic components such as display elements, integrated circuit elements, solid-state imaging elements, color filters, and black matrices, a protective film to prevent deterioration or damage, a planarizing film to flatten the surface of the element or wiring, Various resin films such as electrical insulating films that maintain electrical insulation. Also, in elements such as a thin film transistor type liquid crystal display element and an integrated circuit element, a resin film is provided as an interlayer insulating film in order to insulate...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/004G03F7/038H01L21/027
CPCG03F7/0048G03F7/038G03F7/0045
Inventor 东广和寺田和代木内孝司
Owner ZEON CORP
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