Dielectric barrier discharge excimer light source

A dielectric barrier and excimer technology, applied in discharge lamps, circuits, lasers, etc., can solve problems such as voltage increase and achieve the effect of improving luminous efficiency

Inactive Publication Date: 2007-04-11
SEN ENG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Compared with the light source described in Non-Patent Document 7, the light source constructed in this way has a disadvantage that the voltage at which discharge starts (dielectric breakdown voltage) increases as the pressure of the luminescent gas decreases.

Method used

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  • Dielectric barrier discharge excimer light source
  • Dielectric barrier discharge excimer light source
  • Dielectric barrier discharge excimer light source

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0101] The structure and working principle of the first dielectric barrier discharge excimer light source of the present invention will be described with reference to FIG. 1 and FIG. 2 . Fig. 1 is a schematic cross-sectional view obtained by cutting along the longitudinal direction perpendicular to the anode of the first dielectric barrier discharge excimer light source. Fig. 2 is a schematic longitudinal sectional view obtained by cutting along the longitudinal direction parallel to the anode of the first dielectric barrier discharge excimer light source.

[0102] The anode electrode 10 consists of a straight and long cylinder covered with a dielectric 12 at the periphery of the cylinder. The anode 15 has an anode electrode 10 and a dielectric 12 . In the following description, a structure composed of an anode electrode and a dielectric is also referred to as an anode structure.

[0103] The cathode 25 has a straight semi-cylindrical cathode portion 20 and a cathode wire gr...

no. 2 example

[0117] The structure of the second dielectric barrier discharge excimer light source of the present invention will be described with reference to FIG. 3 . Fig. 3 is a schematic cross-sectional view obtained by cutting along the longitudinal direction perpendicular to the anode of the second dielectric barrier discharge excimer light source. A schematic longitudinal sectional view taken along a longitudinal direction parallel to the anode is omitted since it is the same as that in FIG. 2 . In the following description, in principle, only the cross-sectional view of the light source is shown, and the vertical cross-sectional view that is the same as that in FIG. 2 is omitted unless otherwise necessary.

[0118] The second dielectric barrier discharge excimer light source has the same characteristics as the above-mentioned first dielectric barrier discharge excimer light source, that is, there is an anode electrode 10 made of a hollow straight long cylinder covered with a dielect...

no. 3 example

[0121] The structure of the third dielectric barrier discharge excimer light source of the present invention will be described with reference to FIG. 4 . Fig. 4 is a schematic cross-sectional view of a third dielectric barrier discharge excimer light source cut along a longitudinal direction perpendicular to the anode. A schematic longitudinal sectional view taken along a longitudinal direction parallel to the anode is omitted since it is the same as that in FIG. 2 .

[0122] The third dielectric barrier discharge excimer light source has the same characteristics as the above-mentioned first dielectric barrier discharge excimer light source, that is, it has an anode electrode 40 made of a straight long cylinder covered with a dielectric, and contains the anode electrode 40 The elongated cathode portion 30. However, the shape of the anode electrode 40 is different from that of the cathode portion 30 . The anode electrode 40 is covered with a dielectric 42 and is a straight pi...

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Abstract

An anode electrode (10) is composed of a long straight cylinder-shaped body, and the outer circumference of the cylinder-shaped body is covered with a dielectric (12). A cathode part (20) has a shape of straight half cylinder. A cathode (25) surrounds the anode, and the anode and the cathode are arranged parallel to one another in the lengthwise direction. The cathode is provided with a cathode wire group (16). In the cathode wire group, both edges of the wire are fixed at both edges (20D) of the half cylinder shaped body constituting the cathode part, in the lengthwise direction, so as to have the plurality of wires parallel to one another. On a surface (20S) of the cathode part on a side that faces the anode, a reflecting plane is formed for reflecting radiation in a vacuum ultraviolet region. Thus, high-intensity light having a wavelength in the vacuum ultraviolet region can be obtained, and an object to be irradiated can be efficiently irradiated with the light.

Description

technical field [0001] The invention relates to a vacuum ultraviolet light source for generating light with a wavelength in the vacuum ultraviolet field with high efficiency. [0002] In particular, it relates to a high-efficiency dielectric barrier discharge excimer light source as a vacuum ultraviolet light source (hereinafter also referred to as a VUV light source). The light source can be used in the field of microelectronics to use ultraviolet light to clean materials or to use ultraviolet light to carry out material surface requalification ( surfacereformation: surface re-quality). Background technique [0003] As a spontaneous radiation lamp capable of generating light at a wavelength in the VUV band, a gas light source in which radiation in the VUV band is generated by utilizing the B-X transition of an inert gas is known. The VUV spontaneous emission light source that utilizes dielectric barrier discharge, which can produce strong luminescence when the excimer tran...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J65/00H01S3/038
Inventor 米克黑尔·I.·洛梅夫安德雷·A.·利森戈维特·S.·斯卡冈德米特里·V.·施特茨维特·F.·塔拉森戈松本好家
Owner SEN ENG
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