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Prepn process of heat isolating C/C screen for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace

A heat shield and polysilicon technology, which is applied in the field of heating furnace heat shields, can solve the problems of difficulty in meeting the requirements of semiconductor polysilicon production and development, difficulty in forming large-scale products, poor high-temperature thermal shock resistance, etc., and achieve good densification effect, Highly implementable, enhanced strength effects

Active Publication Date: 2007-01-03
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, the thermal field heat shields for monocrystalline silicon drawing furnaces and polycrystalline silicon smelting furnaces are basically made of graphite. Due to the high strength of graphite products, low thermal conductivity, poor high temperature thermal shock resistance, short service life, frequent replacement, and high purity Low, large-size products are difficult to form, making it difficult to meet the requirements of the development of semiconductor polysilicon production

Method used

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  • Prepn process of heat isolating C/C screen for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] (1) Use 12K needle-punched carbon cloth and non-weft cloth combined with all-carbon fiber three-way structure heat shield prefabricated body, the volume density of the heat shield prefabricated body is 0.3g / cm 3 , using acupuncture technology to introduce reinforcing fibers in the vertical direction of the heat shield preform, where K represents the number of thousands of tows;

[0023] (2) Asphalt or furfurone resin impregnation and carbonization densification process: under a pressure of 1.5 MPa, put the heat shield prefabricated body in step (1) into an impregnation tank for 5 hours, and the heat shield prefabricated body is impregnated and released The tank is transferred to a carbonization furnace for carbonization treatment, and the carbonization temperature is 1000°C;

[0024] (3) Heat shield product density 3 , repeat step (2); heat shield product density ≥ 1.30g / cm 3 At the end of the densification process, under the condition that the purification furnace is ...

Embodiment 2

[0028] (1) Use 12K needle-punched carbon cloth and non-weft cloth combined with full carbon fiber three-way structure heat shield prefabricated body, the volume density of the heat shield prefabricated body is 0.4g / cm 3 , using acupuncture technology to introduce reinforcing fibers in the vertical direction of the heat shield preform, where K represents the number of thousands of tows;

[0029] (2) Asphalt or furfurone resin impregnation and carbonization densification process: under a pressure of 1.5 MPa, put the heat shield prefabricated body in step (1) into an impregnation tank for 5 hours, and the heat shield prefabricated body is impregnated and released The tank is transferred to a carbonization furnace for carbonization treatment, and the carbonization temperature is 800°C;

[0030] (3) Heat shield product density 3 , repeat step (2); heat shield product density ≥ 1.30g / cm 3 At the end of the densification process, under the condition that the purification furnace is ...

Embodiment 3

[0034] (1) Use 12K needle-punched carbon cloth and non-weft cloth combined with full carbon fiber three-way structure heat shield prefabricated body, the volume density of the heat shield prefabricated body is 0.5g / cm 3 , using acupuncture technology to introduce reinforcing fibers in the vertical direction of the heat shield preform, where K represents the number of thousands of tows;

[0035] (2) Asphalt or furfurone resin impregnation and carbonization densification process: under a pressure of 1.4 MPa, put the heat shield prefabricated body in step (1) into an impregnation tank for 5 hours, and the heat shield prefabricated body is impregnated. The tank is transferred to a carbonization furnace for carbonization treatment, and the carbonization temperature is 1100°C;

[0036] (3) Heat shield product density 3 , repeat step (2); heat shield product density ≥ 1.30g / cm 3 At the end of the densification process, under the condition that the purification furnace is fed with ch...

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Abstract

The present invention relates to preparation process of heat isolating C / C screen for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace. The preparation process includes preparing 3D heat isolating screen prefab with carbon fiber; dipping the prefab in mid-temperature pitch or furfural acetone resin and charring repeatedly to reach the compactness of 1.30 g / cu cm; high temperature purifying the heat isolating screen through introducing chlorine and Freon; and final machining to obtain the heat isolating C / C screen for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace. The heat isolating C / C screen for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace has effectively lowered thermal conductivity coefficient, low cost and long service life.

Description

technical field [0001] The invention belongs to the technical field of heating furnace heat shields for single crystal silicon drawing furnaces and polycrystalline silicon smelting furnaces, in particular to a method for preparing a carbon / carbon heat shield for single crystal silicon drawing furnaces and polycrystalline silicon smelting furnaces. Background technique [0002] In addition to the furnace body being made of stainless steel, the single crystal furnace uses graphite parts for the heating system and supports including the crucible. The production of monocrystalline silicon is to melt the polycrystalline silicon material with a graphite heater in an inert gas environment, and grow a dislocation-free single crystal by the Czochralski method. Single crystal silicon is made of high-purity silicon powder, under protective atmosphere conditions such as hydrogen or argon, through 1400-1600 ℃ high-temperature melting seedlings to pull the crystal grains to grow gradually...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/66C04B35/83
Inventor 肖志超彭志刚苏君明邓红兵吴大云孟凡才李睿邵海成邢如鹏赵大明
Owner XIAN CHAOMA SCI TECH
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