Variable capacitance micro electrostatic motor adopting five freedom degree static suspension

Abstract

A five freedom static electricity suspended variable capacity type micro - static electricity motor is used for MEMS systematical micro - execution unit and micro - inertia sensitive element etc field. It contains upper stator, lower stator, rotor, inner stator and outer stator, and suspend control system, wherein the upper and lower stator and inside and outside stator to form one closed intracavity, rotor suspend in annular intracavity geometrical center, utilizing axial direction radial boosting electrode to apply electrostatic force, through detecting capacitor differential variation between electrode and rotor to realize, through suspend control system to realize five freedom active static electricity suspension displacement detection, utilizing rotor salient pole and stator driving electrode to apply driving torque. Said invention provided micro - static electricity motor can restrict rotor all freedom of movement except rotating around the Z axis, not only eliminating mechanical contact induced moment of friction and raising working lives, but also providing larger driving moment and radial overload capacity, to obtain very high rotor speed.

Description

technical field [0001] The invention relates to a micro-electrostatic motor of MEMS (micro-electro-mechanical system) technology, in particular to a variable-capacitance micro-static motor using five-degree-of-freedom active electrostatic suspension, which is used for micro-actuating components and micro-inertial sensitive motors in MEMS systems. components etc. Background technique [0002] MEMS is a micro device or system that integrates micro mechanisms, micro sensors, micro drives, micro actuators, signal processing and control circuits, and even interfaces, communications and power supplies. It has the characteristics of low cost, low energy consumption, miniaturization, high integration and easy mass production. In micro-actuators, micro-motors are usually used as micro-power components, and currently there are mainly electrostatic, electromagnetic and ultrasonic micro-motors. From the aspects of energy density, volume, process, etc., when the size of the motor is le...

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Problems solved by technology

[0005] U.S. Patent (Patent No. US5187399) discloses a "Levitated Micromotor", which has the following deficiencies and defects: 1) It only includes a single-degree-of-freedom levitation along the Z-axis; 2) It uses LC resonance-based Passive electrostatic levitation method, low support stiffness, inconvenient adjustment of system characteristics, and difficult miniaturization of inductance coils; 3) Lateral drive mode, low motor drive torque

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