Variable capacitance micro electrostatic motor adopting five freedom degree static suspension

Abstract

A variable capacitive micro-electrostatic motor adopting five-degree-of-freedom electrostatic levitation is used in the fields of micro-executive components, micro-inertia sensitive elements, etc. of MEMS systems. The present invention includes an upper stator, a lower stator, a rotor, an inner stator and an outer stator, and a suspension control system. The upper and lower stators and the inner and outer stators form a closed inner cavity, and the rotor is suspended in the geometric center of the annular inner cavity during operation. The electrostatic force is applied by radial force electrodes, displacement detection is realized by detecting the capacitance differential change between the electrodes and the rotor, and the five-degree-of-freedom active electrostatic levitation is realized by means of the levitation control system, using the salient poles on the rotor and the driving electrodes on the stator Apply drive torque. The micro-electrostatic motor proposed by the present invention can constrain all degrees of freedom of motion of the rotor except the rotation around the Z axis, which not only eliminates the friction torque caused by mechanical contact, significantly improves the working life, but also provides greater driving torque and radial overload ability to obtain high rotor speeds.

Description

technical field [0001] The invention relates to a micro-electrostatic motor of MEMS (micro-electro-mechanical system) technology, in particular to a variable-capacitance micro-static motor using five-degree-of-freedom active electrostatic suspension, which is used for micro-actuating components and micro-inertial sensitive motors in MEMS systems. components etc. Background technique [0002] MEMS is a micro device or system that integrates micro mechanisms, micro sensors, micro drives, micro actuators, signal processing and control circuits, and even interfaces, communications and power supplies. It has the characteristics of low cost, low energy consumption, miniaturization, high integration and easy mass production. In micro-actuators, micro-motors are usually used as micro-power components, and currently there are mainly electrostatic, electromagnetic and ultrasonic micro-motors. From the aspects of energy density, volume, process, etc., when the size of the motor is le...

AI Technical Summary

Problems solved by technology

[0005] U.S. Patent (Patent No. US5187399) discloses a "Levitated Micromotor", which has the following deficiencies and defects: 1) It only includes a single-degree-of-freedom levitation along the Z-axis; 2) It uses LC resonance-based Passive electrostatic levitation method, low support stiffness, inconvenient adjustment of system characteristics, and difficult miniaturization of inductance coils; 3) Lateral drive mode, low motor drive torque

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