Device and method for preparing nanometer oxide nesa by ultrasound rapid deposition method
A transparent conductive film and nano-oxide technology, applied in the direction of metal material coating process, etc., to achieve uniform physical and chemical properties, reduce internal short circuits, and simple equipment.
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[0030] Preparation of transparent conductive films used in amorphous silicon thin film solar cells, devices such as figure 1 Shown, but to add oxygen cylinders and other carrier gas equipment.
[0031] 1. Preparation process of TCO membrane
[0032] 1.1 Cleaning of substrate material
[0033] The surface of the substrate is first cleaned with deionized water, and then the substrate is soaked in sulfuric acid solution for 2 hours, and then cleaned in an ultrasonic cleaner with an ultrasonic frequency of 20kHz-40Mz for 30 minutes. Take it out and dry it in a clean oven for later use.
[0034] 1.2 Preparation of transparent conductive film
[0035]Firstly, take a certain amount of SnCl4.5H2O, make a solvent with H2O and CH3OH, and then add a certain amount of NH4F aqueous solution in proportion. Put the ultrasonically cleaned 20×20cm glass substrate (6) on the heating furnace (12) and set the temperature of the substrate by the temperature controller (9) to keep the substrate...
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