Apparatus for rotating and drawing of crystal with damping

Abstract

This invention provides a crystal rotation lift and pulls equipment that has damping. It is consisted of flanged shaft, flexibie disc, conical surface rotary table, friction cone, seed rod, supporting enclosure and motor. Two flexible discs are fixed between the lower end of the flanged shaft and the upper end of the conical surface rotary table separately, the keep a certain pressure. The friction cone is fixed at the place of conical surface of conical surface roa\tary table, the lower end of the friction cone is connecdted with seed rod, the conical surface rotary table is fixed on the supporting enclosure by bearing, and it can rotate freely. The supporting enclosure is fixed on the motor. This invention transforms the fixed coupling direct drive between the motor and the seed rod into friction drive. It can bring relative slip, so it can eliminate the torque caused by inertia of the motor, and then it will work as active protecion equipment.

Description

(1) Technical field [0001] The invention relates to a connection and transmission device for growing a single crystal by a pulling method, and belongs to the field of crystal growth equipment. (2) Background technology [0002] The pulling method is a commonly used method for single crystal growth, and is widely used in the growth of various crystals such as semiconductors, lasers, and piezoelectrics. Generally, the polycrystalline raw material is put into the crucible, heated and melted, and the seed crystal is in contact with the molten raw material. Under a certain temperature system, the whole growth process of seeding, necking, shoulder expansion, equal diameter growth and crystal extraction is realized. . The rotation and lifting of the seed crystal is realized by the movement of the seed crystal rod driven by the motor. At present, the seed rod and the motor shaft adopt a rigid connection method, which can directly transmit the rotation of the motor to the seed rod,...

AI Technical Summary

Problems solved by technology

At present, the seed rod and the motor shaft adopt a rigid connection method, which can directly transmit the rotation of the motor to the seed rod, but when the power is suddenly cut off, the melt is rapidly solidified due to a sudden drop in temperature, and the crystal is Frozen on the surface of the melt, the torque generated by the inertial rotation of the motor will deform the seed rod, especially the precious metal part on it, and cause the crystal to crack or break. In severe cases, the entire lifting device will be damaged, causing greater losses. Increased production and equipment maintenance costs

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