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Air filter

A technology of air filtration device and water supply device, which is applied in the direction of gas treatment, use of liquid separation agent, membrane technology, etc., which can solve problems such as damage to goodwill, inability to metabolize and discharge, and a large amount of white smoke, so as to avoid accumulation and air pollution , Increase the effect of pipeline maintenance costs

Inactive Publication Date: 2004-08-04
MACRONIX INT CO LTD
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  • Claims
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AI Technical Summary

Problems solved by technology

When these silicon particles coated with water film are discharged from the exhaust port of the whole factory, a large amount of white smoke will be formed, which makes people mistakenly think that the semiconductor factory is emitting waste gas, and damages the goodwill.
[0005] In addition, most of the discharged silicon particles are non-toxic substances such as silicon dioxide and silicon nitride, but because their particle diameter is only a few microns, which is smaller than ordinary dust particles, it is very easy to float in the air with the wind and be inhaled into the human body. The lungs cannot be metabolized and excreted by tracheal cilia. If exposed to this environment for a long time, lung lesions will easily occur

Method used

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Embodiment Construction

[0023] like Figure 2A As shown, the air filter device of the present invention includes a cavity 10 and a water curtain generator 20 as a known waste gas cleaning tower, and the waste gas cleaning tower 10 is connected with an air inlet pipe 1, an exhaust pipe 2 and a water inlet pipe 4 respectively , the air inlet pipe 1 is connected with the air inlet 11 near the bottom of the cavity 10 below, and a plurality of nozzles 14 are arranged on the inner chamber wall of the exhaust gas cleaning tower 10, and the nozzles 14 are connected to an external water supply device 3 (such as : water supply motor) is connected so that each nozzle 14 continues to spray water mist 141 to the inside of the exhaust gas cleaning tower 10, improving the humidity of the exhaust gas introduced by the air inlet 11. The water curtain generator 20 is socketed at the exhaust port 12 of the exhaust gas cleaning tower 10 and connected to the exhaust pipe 2 . In addition, the water curtain generator 20 h...

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Abstract

An air filter connected with water supplying unit and air pipeline for filtering out the suspended microparticles from flowing gas is composed of a cavity body with multiple nozzles communicated with external water supplying unit for continuously spraying the atomized water into the cavity, and a water curtain generator arranged at the gas outlet of cavity body and connected to external water supplying unit to generate a water curtain to shield the gas outlet. It can be used to filter the corrosive gas from semiconductor factory.

Description

technical field [0001] The invention relates to an air filter device capable of reducing silicide by-products, in particular to an air filter device with a specially designed water curtain generator to reduce silicide suspended particles in waste gas discharged from a semiconductor factory. Background technique [0002] The cleaning tower (Wet Scrubber) mainly filters the suspended particles in the gas and the soluble corrosive gas in it by spraying a large amount of water mist. It is usually used in occasions with a large gas flow, such as: the gas discharge system of the factory and the building central air-conditioning system. [0003] figure 1 It is a schematic diagram of an exhaust gas cleaning tower used in a conventional semiconductor factory. As shown in Figure 1, the exhaust gas cleaning tower 10 is connected to an air inlet pipe 1, an exhaust pipe 2 and a water inlet pipe (not shown) respectively, and the air inlet pipe 1 is connected to the air inlet 11 near the...

Claims

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Application Information

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IPC IPC(8): B01D47/06B01D53/78
CPCB01D47/06B01D2258/0216B01D53/78
Inventor 曾国邦
Owner MACRONIX INT CO LTD
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