Micromachine vibration filter

A micro-mechanical and filter technology, applied in the filter field, can solve the problems of weak vibration signal, smaller beam vibration amplitude, and superposition of noise, and achieve the effect of suppressing the decline of output signal strength and preventing weakening

Inactive Publication Date: 2004-07-28
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] In short, by using a micromechanical vibrator that reduces the size of the mechanical vibrator, the resonance frequency can be increased, but for example, in figure 1 In the structure of the mechanical vibration filter, the input and output lines must be closer to each other. Due to the direct coupling between the output line and the electromagnetic field of the input line, there will be a problem of signal leakage in an unnecessary frequency band that is superimposed as noise.
In addition, since the vibration amplitude of the beam becomes smaller, the detected vibration signal becomes weaker and susceptible to interference

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] image 3 It is a schematic diagram of the micromechanical vibration filter of Embodiment 1 of the present invention. The waveguide is a microstrip line type, and the strip conductor 1 and the ground conductor 2 are provided with a dielectric substrate 3 in between, and a filter part 4 is formed on a part of the strip conductor 1, and the signal source e is connected to the strip conductor 1 and the ground conductor. between 2.

[0056] Figure 4 It is a side sectional view of the filter unit 4 . Micro-cylindrical single-support micro-cylindrical beams 5 composed of a plurality of conductors stand in an array on the strip conductor 1 . In addition, if Figure 5 Partial enlarged side section view of and Figure 6 As shown in the partially enlarged plan view of , there is a gap g around the front end of the micro-cylindrical beam 5 1 , g 2 A detection electrode 6 is provided. In the present embodiment 1, the detection electrode 6 is a flat plate surrounded by the m...

Embodiment 2

[0069] Figure 8 Related to Embodiment 2 of the present invention, its overall structure is the same as image 3 The shown embodiment 1 is the same, but in this embodiment 2, a pair of micro cylinders 5a, 5b facing the micro cylinder beam 5 are arranged side by side in an array, and a micro cylinder beam 5a forms a capacitor with the common detection electrode 6a respectively , the front end of the other micro-cylindrical beam 5b is respectively fixed on the common detection electrode 6b through the fixing material 9 . Figure 9 In its plan view, the micro-cylindrical beams 5a, 5b are respectively arranged opposite to the detection electrodes 6a, 6b with a gap of g, and the detection electrodes 6a, 6b are arranged opposite to each other at an interval A. The detection electrode 6 a is connected to the first comparator 7 b of the detection circuit 7 , and the detection electrode 6 b is connected to the second comparator 7 c of the detection circuit 7 .

[0070] By the signal ...

Embodiment 3

[0073] Figure 10 and Figure 11 It is a plan view and a side view of the micromechanical vibration filter according to the third embodiment of the present invention. Part of the strip conductor 1 of the microstrip type is replaced by a plurality of coil springs 10 serving as a micromechanical vibrator connected in parallel in an array. However, if Figure 10 As shown, the two ends of the coil spring 10 are installed at an angle θ to the direction of the transmission path. Since the coil spring 10 is slightly bent at its center to form an opening 11, if a current flows through the coil spring 10, the internal magnetic flux becomes The state of leaking from the opening 11. However, since a force that maximizes the magnetic energy inside the coil spring 10 acts on the coil spring, the coil spring 10 closes the opening 11 to be in a linear state. Due to this force, the coil spring 10 vibrates at a natural resonant frequency. This mechanical vibration is detected as a change ...

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Abstract

A compact high-performance mechanical vibration filter which deals with high frequency band signals. Microcolumn beams as minute mechanical vibrators are used to increase a mechanical resonance frequency. The plural microcolumn beams are arranged in an array and a common detection electrode surrounds each microcolumn beam with prescribed gaps between them, thereby preventing an output signal from becoming weak. When some of the mechanical vibrators are restrained from vibrating, it is possible to monitor and remove a noise component generated in the output signal by direct electromagnetic coupling of an input signal.

Description

technical field [0001] The present invention relates to a filter mounted in an electric circuit or a transmission line in a wireless device, etc., and particularly relates to a filter having a small size and a steep selection characteristic by utilizing micromechanical vibration in a high-density integrated circuit that processes signals in the MHz to GHz band Micromachined Vibration Filter. Background technique [0002] figure 1 The structure of a conventional mechanical vibration filter is simply shown (for example, refer to IEEE Journal of Solid-state Circuits, Vol. 35, No. 4, pp. 512-526, April 2000). This filter is formed on a silicon substrate by a thin film forming method, and it consists of an input line 104 and an output line 105, beam-type resonators 101 and 102 fixed at both ends with a gap of 1 micron or less for each line, and the two beams Coupled coupling beams 103 are formed. The signal input from the input line 104 is capacitively coupled to the resonator...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00H01P1/12H01P1/20H01P1/201H03H3/007H03H9/02H03H9/24H03H9/46H03H9/50
CPCH03H9/2405H01P1/20H03H9/02259H03H9/462H03H3/0072H03H2009/02511H01P1/2013H03H9/02338H01P1/127Y10S977/733
Inventor 中村邦彦中西淑人
Owner PANASONIC CORP
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