CMOS transistor inverter with multiple grid transistor
An oxide semiconductor and transistor technology, which is applied in semiconductor devices, semiconductor/solid-state device manufacturing, transistors, etc., can solve the problems that the inverter circuit of multi-gate MOSFET has not been proposed yet, and is difficult to avoid short channel effect. , improve performance, good grid control effect
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[0071] The present invention proposes a complementary metal-oxide-semiconductor transistor inverter using multi-gate MOSFETs.
[0072] In the present invention, an inverter circuit is configured using a multi-gate MOSFET having a gate on the top surface of a semiconductor fin to solve the existing problems. The multi-gate MOSFET with a gate on the top surface of the semiconductor fin includes a tri-gate MOSFET and an Omega field effect transistor (Ω-FET). A tri-gate MOSFET structure has three gates, one on the top surface of the semiconductor fin and two on either side of the semiconductor fin. Tri-gate assemblies have better gate control than dual-gate assemblies due to the addition of an additional gate on top of the semiconductor fin.
[0073] Figure 4A is the top view of the Tri-Gate MOSFET, Figure 4B for along Figure 4A Schematic diagram of the cross-sectional structure of 4B-4B′. A tri-gate MOSFET is very similar to a double-gate MOSFET, except that the etch mask...
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