Low vacunm bonding method of polydimethylsiloxane chip
A polydimethylsiloxane, low-vacuum technology, applied in biochemical equipment and methods, material inspection products, instruments, etc., can solve the problems of high chip temperature, easy damage to the chemical composition of the chip surface, and impact on chip performance, etc. To achieve the effect of simple equipment
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Embodiment 1
[0027] Pour the silicone rubber material into the chip mold, and freshly peel off after polymerization to obtain the PDMS chip component, put it into the vacuum chamber, and evacuate until the background vacuum of the chamber is 0.2Torr; rinse with oxygen repeatedly 3 times, discharge the residual gas, Turn off the oxygen flow, then evacuate (that is, the oxygen pressure) to 0.3Torr, and apply a high voltage of 1400V (the current is 220mA), so that the oxygen in the cavity is glowed, and the oxygen plasma is bombarded on the surface of the PDMS chip for 40s; open the vent valve , Inflate the vacuum chamber to the equilibrium with the atmospheric pressure, then open the vacuum chamber, attach the chips, and keep warm at 100°C for 2 hours to achieve irreversible bonding.
[0028] After oxygen plasma treatment, the surface of the PDMS chip has a strong hydrophilicity, and its contact angle is close to 0°, but the hydrophilicity gradually deteriorates with time, and it almost retur...
Embodiment 2
[0033]Pour the silicone rubber material into the chip mold, and peel it off freshly after polymerization to obtain the PDMS chip component, put it into the vacuum chamber, and evacuate it until the background vacuum of the chamber is 0.15Torr; wash it twice with oxygen repeatedly, and discharge the residual gas. Turn off the oxygen flow, then evacuate (that is, the oxygen pressure) to 0.25Torr, and apply a high voltage of 2000V (the current is 380mA) to make the oxygen in the chamber glow and bombard the surface of the PDMS chip with oxygen plasma for 5s; open the vent valve , Inflate the vacuum chamber to the equilibrium with the atmospheric pressure, then open the vacuum chamber, attach the chips, and keep warm at 120°C for 1.5h to achieve irreversible bonding.
[0034] After oxygen plasma treatment, the surface of the PDMS chip has a strong hydrophilicity, and its contact angle is close to 0°, but the hydrophilicity gradually deteriorates with time, and it almost returns to ...
Embodiment 3~10
[0036] Example
[0037] Experiments have shown that the hydrophilicity of PDMS chips treated with oxygen plasma has been greatly improved, and water droplets can spread rapidly on the PDMS surface (the contact angle is close to 0°).
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