Two-demensional magnetic sensors
A magnetic sensor and sensor element technology, applied in variable inductance/transformer, size/direction of magnetic field, electrical components, etc., can solve the problems of expanding power consumption, large size of MI components, and difficulty in small electronic devices, etc. The effect of reducing power consumption
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[0021] Hereinafter, the embodiment of the MI element of the present invention is shown in Fig. 1, figure 2 shown.
[0022] The size of the substrate 1 is 0.5 mm in width, 0.5 mm in height and 3 mm in length. As the induction magnet, a CoFeSiB-based alloy and an amorphous alloy magnetic body 2 having a diameter of 30 μm were used. The groove 11 on the substrate has a depth of 50 μm, a width of 70 μm, and a length of 3 mm. The electromagnetic coil 3 is formed by a two-layer structure of one side 31 of the coil formed on the groove surface 111 and the other side coil 32 formed on the groove surface 112 (upper surface 41 of the resin 4), and the average inner diameter (and The area formed by the height and the width is equal to the diameter of a circle) was 66 μm. The winding pitch of the electromagnetic coil 3 with respect to the unit length was 50 μm / coil.
[0023] Between the amorphous alloy magnetic body 2 and the electromagnetic coil 3, an insulating resin 4 is arranged t...
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