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Minisize three-dimensional self-scanning confocal microscope

A confocal microscope and self-scanning technology, applied in the field of inspection, can solve the problems of low frequency response of dynamic characteristics, limited application, complicated scanning mechanism, etc., and achieve direct three-dimensional self-scanning measurement of dynamic characteristic frequency response, dynamic characteristic frequency response High and stable effect

Inactive Publication Date: 2007-02-14
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

This measurement technique is effective, but its large structure and low frequency response of its dynamic properties limit its application, especially preventing its direct use in vivo
Moreover, the scanning mechanism of this method is relatively complicated, and the influence of vibration limits the improvement of measurement accuracy and speed, which does not meet the current needs of rapid online detection

Method used

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  • Minisize three-dimensional self-scanning confocal microscope
  • Minisize three-dimensional self-scanning confocal microscope

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Embodiment Construction

[0011] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0012] Such as figure 1 As shown, the miniature three-dimensional self-scanning confocal microscope includes a point light source 1, a first microlens 2, a micro-optical beam splitter 3, a miniature three-dimensional self-scanner, a third microlens 10, a pinhole 11, and a miniature photodetector 12 and control device 13.

[0013] The miniature three-dimensional self-scanner includes a micro-scan mirror 4, a second micro-lens 5 and a double-comb linear scanner. Wherein, the double-comb linear scanner is composed of a mover 6 and two X-direction linear drivers 7 and Z-direction linear drivers 8 as stators, the second microlens 5 is located on the mover 6, and the X-direction linear driver 7 is used for The mover 6 is driven to move along the X direction, and the Z-direction linear driver 8 is used to drive the mover 6 to move along the Z direction.

[0014] ...

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Abstract

The invention discloses a mini three-dimensional scanning confocal microscope. The double-comb linear scanning comprises an actor, two X linear drivers using as stator, Z linear driver, the second microlens is set on the actor, the light from the point-source become to the collimated light laser beam after passing the fist microlens, the beam goes through the mini optical spectroscope, reflected by the micro-scanning reflector, and focalize on the sample by the second microlens, the reflected or fluorescence light passes the second microlens and the micro-scanning reflector along the original path and returns to the mini optical spectroscope, the reflected light shines in the micro-light detector through the third microlens and the pinhole, the controlling device is used to collect and process the data and control said linear scanning on the focus of the direction X and Y.

Description

technical field [0001] The invention belongs to the technical field of detection, and in particular relates to a miniature three-dimensional self-scanning confocal microscope. Background technique [0002] Confocal microscopy is widely used in biomedical research as a powerful imaging analysis tool for translucent biological samples, including cells and tissues. In addition, it is also widely used in non-contact measurement and research of microfabrication and various engineering surfaces, and vision of autonomous microrobots. In recent years, scholars have conducted a lot of research on this technology, which has been mainly based on conventional confocal microscopy. [0003] In "Confocal optical microscopy" (see Rep.Prog.Phys.1996, 59: 427-471.) a confocal microscope with a laser single point scanning method or a disk conjugate lattice scanning method is proposed. Its three-dimensional measurement technology usually uses a two-dimensional layer scanning mechanism and a o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N13/10G02B21/00
Inventor 张新宝
Owner HUAZHONG UNIV OF SCI & TECH
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