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Pulse pipe refrigerating machine and cryopump using refrigerating machine

A pulse tube refrigerator, cryogenic pump technology, applied in refrigerators, gas cycle refrigerators, refrigeration and liquefaction, etc., can solve problems such as rising prices and complex mechanisms, and achieve lower device prices, reduce failure frequency, and reduce The effect of energy consumption

Inactive Publication Date: 2000-11-08
AIR WATER INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in such a configuration, the mechanism becomes complicated and the price increases

Method used

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  • Pulse pipe refrigerating machine and cryopump using refrigerating machine
  • Pulse pipe refrigerating machine and cryopump using refrigerating machine
  • Pulse pipe refrigerating machine and cryopump using refrigerating machine

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] In the same cryopump as the above embodiment, the filling absolute pressure is 18.0kgf / cm 2 Nitrogen is used as the working gas. When the pulse tube refrigerator is operated, it passes through the heater installed at the cold end (this is installed for the experiment to apply the heat load), and the temperature change of the cold end when the heat load is applied is investigated. . The result is as figure 2 shown (measurement results are shown in black circles). Depend on figure 2 It can be seen that the temperature maintenance effect due to the liquefaction of the working gas can be achieved, and the cooling temperature can be maintained in the range of 112-115K when the heat load is 0-60W. Also, nitrogen at 16.4kgf / cm 2 When the liquefaction temperature is 112K.

Embodiment 2

[0021] In the same cryopump as in the above-mentioned embodiment, the partial pressure of filling nitrogen gas is 14.4kgf / cm 2 And helium is 3.6kgf / cm 2 As the working gas, the pulse tube refrigerator was operated in the same manner as in Example 1, and passed through the heater installed at the cold end (this was installed for the experiment to apply a heat load), and the cooling effect when a heat load was applied was investigated. temperature change at the tip. The result is as figure 2 shown (measurement results are shown in white circles). Depend on figure 2 It can be seen that the temperature maintenance effect due to the liquefaction of the working gas can be achieved, and the cooling temperature can be maintained in the range of 99-110K when the heat load is between 0-60W. In Example 2, nitrogen and helium are in gas-liquid equilibrium, so compared with Example 1, the attainable temperature is lower. Also, nitrogen at 14.7kgf / cm 2 When the liquefaction temperat...

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Abstract

A pulse pipe refrigerating machine capable of keeping a cooling temperature without using a heater, wherein a gas with a liquefied temperature within the service temperature range of the pulse pipe refrigerating machine is used as a working mixture.

Description

technical field [0001] The present invention relates to a high-reliability pulse tube refrigerator and a cryopump using the refrigerator. The pulse tube refrigerator can maintain the cooling temperature of the pulse tube refrigerator without using additional mechanisms such as heaters. Background technique [0002] Generally speaking, a cryopump achieves a high vacuum effect by adsorbing gas molecules on an adsorption panel installed at a cold head of a refrigerator. In this cryopump, when gas molecules are adsorbed on the adsorption panel, the cooling temperature of the adsorption panel must be maintained within a certain range. [0003] For example, in a cryopump dedicated to moisture, the adsorption panel 3 (refer to figure 1 ) must be maintained at a cooling temperature in the range of about 110K. figure 1 Schematic structure of a cryopump dedicated to moisture. In the figure, 1 is a GM refrigerator, 2 is a cold end part, 3 is an adsorption panel installed on the cold...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F25B9/00F04B37/08F25B9/14
CPCF04B37/08F25B9/145F25B9/006F25B2309/1417
Inventor 宫本笃垣见康浩国谷晋吾伊藤大介
Owner AIR WATER INC
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