Preparation method of high-performance high-frequency surface acoustic wave device based on electron beam exposure

Abstract

According to the preparation method of the high-performance high-frequency surface acoustic wave device based on electron beam exposure provided by the invention, surface tackifying treatment is carried out on an insulating composite substrate, so that a glue type structure can be prevented from moving or falling off, and meanwhile, the glue uniformizing uniformity can also be improved; a double-layer glue system is selected, and the inverted trapezoidal structure is prepared by regulating and controlling the exposure dose, so that glue removal and stripping are facilitated, the stripping yield is improved, and glue residues formed by film breakage can be reduced; the conductive layer is formed on the surface of the double-layer glue structure, charge accumulation of electron beams in the exposure process can be effectively dredged, electron beam positioning errors and surface spark discharge caused by formation of a micro electric field are avoided, and it is guaranteed that a transfer process of a design pattern can be effectively transferred to glue; and in the developing and stripping processes, the double-layer adhesive only needs to be developed and removed once, so that the production efficiency is relatively high. The method has the advantages of simple and easy process, high productivity, good repeatability and high yield, and is suitable for batch preparation.

Description

technical field [0001] The invention belongs to the technical field of microelectronic devices, and relates to a preparation method of a high-performance high-frequency surface acoustic wave device based on electron beam exposure. Background technique [0002] A Surface Acoustic Wave (SAW) device is a micro-nano functional device prepared on a piezoelectric material. The core unit structure is an interdigital transducer (also known as an interdigital electrode). It is composed of metal films of positive and negative electrodes arranged in a linear manner. Its function is to convert the applied sinusoidal alternating current signal into a surface acoustic wave vibration signal of the same frequency. On the contrary, the surface acoustic wave signal transmitted on the solid surface can also be converted by an interdigital transducer. into an electrical signal. [0003] SAW mainly propagates in a wavelength range on the solid surface and has a high energy density. Under the pe...

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Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a method for preparing a high-performance high-frequency surface acoustic wave device based on electron beam exposure, which is used to solve the problem that it is difficult to prepare a high-performance high-frequency surface acoustic wave device in the prior art

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