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Coating thickness control method and device and storage medium

A thickness control and film thickness technology, applied in character and pattern recognition, instruments, complex mathematical operations, etc., can solve the problems of not paying attention to the influence of coating film and insufficient film quality, so as to achieve real-time control of coating thickness, reduce the amount of calculation, The effect of improving the coating quality

Pending Publication Date: 2022-06-24
无锡唯因特数据技术有限公司
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Problems solved by technology

However, the above method only pays attention to the length of the coating time, which is only one of the factors affecting the quality of the coating in the coating process, and does not pay attention to the influence of other process parameters of the coating on the quality of the film.
The quality of film formation under this method may have relatively large deficiencies

Method used

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  • Coating thickness control method and device and storage medium
  • Coating thickness control method and device and storage medium
  • Coating thickness control method and device and storage medium

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Embodiment Construction

[0043] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have ...

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Abstract

The invention discloses a coating thickness control method and device and a storage medium, and relates to the technical field of intelligent control, the method comprises the steps that target clustering information of target parameters is acquired, and the target clustering information comprises first clustering information of film thickness data and second clustering information of process operation parameters; periodically collecting real-time process operation parameters in the coating process; and controlling the coating thickness according to a Bayesian algorithm, the target clustering information and the periodically acquired real-time process operation parameters. The problem that the coating quality obtained through an existing coating control method is insufficient is solved, and the effects that the real-time process operation parameters can be periodically collected, then the coating thickness is controlled in real time, and the coating quality is improved are achieved.

Description

technical field [0001] The invention relates to a coating thickness control method, device and storage medium, belonging to the technical field of intelligent control. Background technique [0002] With the rapid development of the photovoltaic industry, the quality of photovoltaic cells has become a key factor affecting the vitality of enterprises. During the production process of the cell, it needs to go through the PECVD (Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical vapor deposition) coating process. film thickness. Therefore, it is necessary to find abnormal parameters in time, estimate whether the film thickness can reach the expected value, and adjust the parameters in time if the expected value cannot be reached. [0003] In the existing solution, in order to predict the PECVD coating thickness, a common method includes using the coating time to predict the film thickness. If the coating time is insufficient, it is considered that the film thi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/18G06K9/62
CPCG06F17/18G06F18/23213G06F18/24155
Inventor 刘孝阳陈丞刘义俊白伟锋
Owner 无锡唯因特数据技术有限公司
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