Liquid material roller coating method
A liquid material and roller coating technology, which is applied to coatings, devices for coating liquid on the surface, semiconductor devices, etc., can solve the problems of uneven liquid flow on the liquid coating roller, uneven roller coating, and uneven thickness of the liquid material. To achieve the effect of uniform liquid and roller coating
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment 1
[0012] A liquid material roller coating method, which adopts a roller table to transport silicon wafers, uses a flat liquid coating roller to roll a liquid material on a flat silicon wafer conveyed on the roller table, and uses a liquid-carrying roller parallel to the liquid coating roller to control the coating liquid The liquid thickness of the roller, the liquid supply pipe is used to supply the liquid material to the liquid coating roller and the liquid carrying roller; the liquid supply pipe, the liquid carrying roller and the liquid coating roller are located directly above the roller table;
[0013] And a liquid blocking structure is arranged at both ends of the liquid coating roller; the liquid blocking structure includes: a pair of annular folds respectively arranged at both ends of the liquid coating roll; making the pair of annular folds and the liquid coating roll coaxial; The roller is located between the pair of annular folded edges, and the pair of annular folded...
Embodiment 2
[0017] A liquid material roller coating method, which adopts a roller table to transport silicon wafers, uses a flat liquid coating roller to roll a liquid material on a flat silicon wafer conveyed on the roller table, and uses a liquid-carrying roller parallel to the liquid coating roller to control the coating liquid The liquid thickness of the roller, the liquid supply pipe is used to supply the liquid material to the liquid coating roller and the liquid carrying roller; the liquid supply pipe, the liquid carrying roller and the liquid coating roller are located directly above the roller table;
[0018] And a liquid-blocking structure is arranged at both ends of the liquid-carrying roller; the liquid-blocking structure includes: a pair of annular folds respectively arranged at both ends of the liquid-carrying roller; The roller is located between the pair of annular folds, and the pair of annular folds are respectively abutted against both end faces of the liquid coating rol...
Embodiment 3
[0022] A liquid material roller coating method, which adopts a roller table to transport silicon wafers, uses a flat liquid coating roller to roll a liquid material on a flat silicon wafer conveyed on the roller table, and uses a liquid-carrying roller parallel to the liquid coating roller to control the coating liquid The liquid thickness of the roller, the liquid supply pipe is used to supply the liquid material to the liquid coating roller and the liquid carrying roller; the liquid supply pipe, the liquid carrying roller and the liquid coating roller are located directly above the roller table;
[0023] And a liquid-blocking structure is arranged at both ends of the liquid-coating roller and the liquid-carrying roller; the liquid-blocking structure includes: a pair of annular grooves respectively arranged at both ends of the outer peripheral surface of the liquid-applying roller, and two A pair of liquid blocking convex rings;
[0024] Make the pair of annular grooves coaxi...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com