Method for integrating positioning, slotting, rechecking and self-checking of barreling equipment

Abstract

The invention discloses a method for realizing the integration of positioning, slotting, rechecking and self-checking of barreling equipment, which comprises the following steps: S1, firstly, carrying out a 100 single crystal slotting step: automatically finding a corner angle on a single crystal machine to measure a peak value, rapidly rotating to a certain angle to slowly find a signal peak value, and carrying out the step S2; in the same method, the crystal orientation is rotated by a certain angle, four maximum peak points are measured, and grooving is performed after the original point position 110 of the maximum peak current position is 0 degree and the original point position 100 is 45 degrees plus the original point correction amount. According to the invention, the grooving precision is improved, the crystal orientation precision deterioration caused by mechanical wear is reduced, the grooving error rate is reduced, the full-automatic processing of the barreling machine can be realized, the barreling processing efficiency is greatly improved, and the recheck of the zero offset of the mechanical position after grooving can be realized. By means of the method, the barreling crystal bar slotting positioning time is greatly shortened, the slotting orientation precision is improved, the slotting error rate is reduced, and finally the silicon bar barreling machining efficiency is greatly improved.

Description

technical field [0001] The invention relates to the technical field of realizing automatic positioning, slotting and re-inspection of semiconductor crystal rods on rolling equipment, in particular to a method for realizing the integration of positioning, slotting, re-inspection and self-inspection of rolling equipment. Background technique [0002] At present, there are mainly two methods of oriented grooving by tumbling and grooving of semiconductor silicon rods. One is to rely on manual oriented equipment to draw lines, and then tumbling and grooving. This method has low efficiency and poor orientation accuracy, and 111 single crystal grooving It is easy to make mistakes, and the other is to rely on the automatic orientation of the equipment, but only 100 and 110 reference planes can be grooved for 100 single crystals. This method cannot currently be used for 111 single crystals. Neither comes with a recheck function. Contents of the invention [0003] The purpose of th...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a method for realizing the integration of re-inspection and self-inspection for positioning and slotting of rolling equipment, so as to solve the problem proposed in the above background technology. At present, there are mainly two methods for the known semiconductor silicon rod rolling and directional slotting. One is to rely on manual orientation equipment to draw lines and then roll and groove. This method has low efficiency and poor orientation accuracy, and 111 single crystal grooves are easy to make mistakes. The other relies on automatic equipment orientation, but it can only be used for 100 single crystals. The 100 and 110 reference planes are grooved on the single crystal. This method is currently unable to groove the 111 single crystal orientation. The scheme is immature, and the above two schemes do not have the problem of re-inspection function.