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Coating method for plasma deposition after laser evaporation

A technology of plasma deposition and laser evaporation, which is applied in the direction of fusion spraying, metal material coating process, coating, etc., can solve the problems of long time consumption, high cost, overheating of parts, etc., and achieve the effect of wide application range

Pending Publication Date: 2022-03-25
浙江巴顿焊接技术研究院 +3
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention is to overcome the problems of high cost and long time consumption in the existing laser coating technology in the prior art. The focus of laser radiation is close to the parts to be sprayed, which will cause the parts to overheat and damage the coating, and the optical breakdown caused by laser radiation will affect the spray coating. The problem of incomplete treatment of powder particles provides a method that can apply coatings by laser evaporation, and then atomize target vapor particles by plasma and deposit them, providing the possibility to apply uniform thin film coatings Coating method of plasma deposition after laser evaporation

Method used

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  • Coating method for plasma deposition after laser evaporation
  • Coating method for plasma deposition after laser evaporation
  • Coating method for plasma deposition after laser evaporation

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Embodiment 1

[0028] The invention provides a coating method for plasma deposition after laser evaporation, comprising the following steps:

[0029] S1, using a plasma accelerator directed to the surface of the part to be sprayed, the plasma accelerator generating a plasma flow, and providing laser radiation perpendicular to the plasma flow;

[0030] S2, generating vapor by focusing the evaporation target with laser radiation;

[0031] S3, depositing the vapor generated in step S2 on the surface of the part to be sprayed by indirect plasma jet, finally forming a thin film coating.

[0032] Specifically, such as figure 1 as shown, figure 1 Indicates the principle of plasma deposition after laser evaporation. Laser radiation 1 is focused by a plasma jet generated by a plasma accelerator 2 onto the surface of a target 3 made of the metal to be sprayed. The target is placed on the movable platform 4 to ensure that it has continuous movement, a stable evaporation process and prevent local ov...

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Abstract

The invention belongs to the technical field of material surface treatment, and particularly relates to a coating method for plasma deposition after laser evaporation. Comprising the following steps that S1, a plasma accelerator pointing to the surface of a to-be-sprayed part is used, and the plasma accelerator generates plasma flow and provides laser radiation perpendicular to the plasma flow; s2, focusing the evaporation target material through laser radiation to generate steam; and S3, the steam generated in the step S2 is deposited on the surface of the sprayed part through indirect plasma jet, and finally the thin film coating is formed. The method has the advantages that the coating can be coated through laser evaporation, then target material vapor particles are atomized through plasma and deposited, and the possibility is provided for coating the uniform thin film coating (from 10 nm to 100 microns).

Description

technical field [0001] The invention belongs to the technical field of material surface treatment, and in particular relates to a coating method for plasma deposition after laser evaporation. Background technique [0002] There is a patent (patent RU № 2494172: a wear-resistant coating process, author: AbdullinI.Sh.), VasilievI.I. ), Gatina (Gatina) E.B., etc., Kazan National Research Technological University; МПКC23C14 / 06, МПКC23C14 / 24; 07.08.2012.): It can be used in metal processing, medical equipment, tools and maintenance industries to obtain tool coatings. The coating is applied by the vacuum ion-plasma method using at least two arc evaporators, one of which contains a hafnium or zirconium cathode and the other a titanium cathode. The coating is deposited in a chamber, wherein the medium is a nitrogen-oxygen mixed gas with an oxygen content of 1-3wt%, and a pressure of 0.07-0.45Pa. The patented method increases tool performance by increasing the hardness and wear res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C4/134
CPCC23C4/134
Inventor 赵军军哈斯金·弗拉基斯拉夫郭瑞·弗拉基米尔张航佩雷申科·斯维亚托斯拉夫乐望贇斯特罗戈诺夫·德米特罗伊利亚申科·叶夫格尼
Owner 浙江巴顿焊接技术研究院
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