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Sample box for glow discharge analysis and characterization and use method

A technology of glow discharge and sample box, which is used in electrical excitation analysis, material analysis by optical means, and material analysis, etc. The effect of resolution improvement

Pending Publication Date: 2022-03-22
NCS TESTING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This special analysis fixture for glow discharge spectrometer cannot solve the problem of repeating the analysis at the same position after taking out and repositioning the sample, and it does not have the effect of improving the flatness of glow discharge sputtering crater and improving the depth resolution

Method used

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  • Sample box for glow discharge analysis and characterization and use method
  • Sample box for glow discharge analysis and characterization and use method
  • Sample box for glow discharge analysis and characterization and use method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0090] Using the method of using the sample box for glow discharge analysis and characterization, multiple glow discharge analysis and characterizations are performed on the nickel-based single crystal superalloy sample at the same position. The operation steps are as follows:

[0091] S1. Precisely position the nickel-based single crystal superalloy sample according to the size of the sample holding hole of the fixture 4 and the size of the sample box, and cut and process it into a suitable size and shape, such as processing it into a cylinder with a diameter of 30 mm and a thickness of 30 mm. Ultrasonic cleaning is performed on the surface of the sample to remove oil and impurities brought about by the processing. Use a sample grinding machine to process the side of the sample to be analyzed to obtain a flat and clean surface; it is recommended to use a sandpaper of 600 mesh or more for the sample grinding, and the sample surface can also be polished. A smoother sample surfa...

Embodiment 2

[0097] Using the method of using the sample box for glow discharge analysis and characterization, the glow discharge depth profile analysis is carried out on the galvanized sheet sample. The operation steps are as follows:

[0098] S1. Precisely position the galvanized sheet sample according to the size of the sample holding hole of the jig 4, cut and process it into a suitable size and shape, for example, process it into a sheet with a diameter of 30 mm. Ultrasonic cleaning is performed on the surface of the sample to remove oil and impurities brought about by the processing. When the thin slice sample is too thin, the thin slice sample can be glued together with the thickened cylindrical sample with conductive double-sided adhesive tape, and the sample analysis surface needs to be exposed outside. On the back side of the thickened sample (non-analytical surface), several corresponding marking points are prepared for accurate positioning of the sample in the sample precise p...

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Abstract

The invention relates to a sample box for glow discharge analysis and characterization and a use method. The sample box comprises a sample box body, a sample box cover, a second cathode plate, a sample accurate positioning clamp, a top block and a positioning spring; the sample box cover and the second cathode plate are respectively arranged at the front end and the rear end of the sample box body; the sample accurate positioning clamp is detachably and fixedly connected to the inner wall of the sample box body and used for clamping a sample and accurately positioning the sample through scale marks, and the rear end face of the sample accurate positioning clamp and the analysis surface of the sample are located on the same plane and both make close contact with the second negative plate; and the top block and the positioning spring are sequentially arranged between the sample accurate positioning clamp and the sample box cover to press and position the sample accurate positioning clamp. The application range of sample analysis of glow discharge analysis characterization is greatly expanded, the glow discharge analysis characterization performance is improved, and the device has the advantages of being accurate in sample position positioning, simple in structure and convenient and reliable to use.

Description

technical field [0001] The invention belongs to the technical field of material analysis and characterization, in particular to a sample box for glow discharge analysis and characterization and a use method. Background technique [0002] Glow discharge is a kind of low-pressure gas discharge, which is used as an effective atomization and excitation light source for elemental composition analysis and depth profile analysis of solid samples. Due to the simplicity of the glow discharge analysis characterization operation and the wide range of applications, it has developed into a multi-faceted analysis technique suitable for the analysis of metals, non-metals, thin films, semiconductors, insulators and organic materials. Usually, Ar gas with a certain pressure (hundreds of Pa) is filled in a closed device, the sample is used as a cathode, and a high enough voltage (generally 250-2000V) is applied between the two electrodes to form a glow discharge. In the glow discharge, the s...

Claims

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Application Information

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IPC IPC(8): G01N21/67G01N21/01
CPCG01N21/67G01N21/01
Inventor 余兴王海舟李小佳夏钟海朱一妃石慧侯艳霞王辉沈学静
Owner NCS TESTING TECH
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